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DC 마그네트론 반응성 스퍼터링법에 의해서 제작된 TiO-N 박막의 구조 및 광학적특성에 관한 연구
박장식(Jang Sick Park),박상원(Sang Won Park),김태우(Tae Woo Kim),김성국(Sung Kuk Kim),안원술(Won Sool Ahn) 한국표면공학회 2004 한국표면공학회지 Vol.37 No.6
Extensive efforts have been made in an attempt to utilize photocatalytic properties of TiO₂ in visible range. TiO₂ and TiO-N thin films were made by the DC reactive magnetron sputtering method at 300℃. Various gases (Ar, O₂ and N₂) were used and Ti target was impressed by 0.6 ㎸~5.8 ㎸ power range. The hysteresis phenomenon of the TiO₂ thin film as a function of the discharge voltage characteristic was observed to be higher as applied power increases. That of TiO-N thin film was occurred at the 5.8 ㎸ power. The cross section and surface roughness of thin films were observed by FE-SEM and AFM. Average surface roughness of TiO-N thin film was observed as l5.9Å and that of TiO₂ as l3.2Å. The crystal phases of both TiO₂ and TiO-N thin films were found to be anatase structure. The atomic β-N (396 eV peak in N 1s XPS) was shown in the rutile crystal of TiO-N and was considered acting as the origin of wavelength shift to the visible light.
다공성 흑연의 기공내부로 침투하는 Si 증발입자의 확산
박장식(Jang-Sick Park),황정태(Jungtae Hwang) 한국표면공학회 2016 한국표면공학회지 Vol.49 No.1
Graphite’s thermal stability facilitates its widespread use as crucibles and molds in high temperatures processes. However, carbon atoms can be rather easily detached from pores and outer surfaces of the graphite due to the weak molecular force of the c axis of graphites. Detached carbon atoms are known to become a source of dust during fabrication processes, eventually lowering the effective yield of products. As an effort to reduce these problems of dust scattering, we have fabricated SiC composites by employing Si vapor infiltration method into the pores of graphites. In order to understand the diffusion process of the Si vapor infiltration, Si and C atomic percentages of fabricated SiC composites are carefully measured and the diffusion law is used to estimate the diffusion coefficient of Si vapor. A quadratic equation is obtained from the experimental results using the least square method. Diffusion coefficient of Si vapor is estimated using this quadratic equation. The result shows that the diffusion length obtained through the Si vapor infiltration method is about 10.7 times longer than that obtained using liquid Si and clearly demonstrates the usefulness of the present method.
반응성 마그네트론 스퍼터링법에 의한 Nickel Oxide 박막 제작 특성에 관한 연구
김기범,황윤식,김영식,박장식,Kim, Gi-Bum,Hwang, Yun-Sik,Kim, Yeung-Shik,Park, Jang-Sick 한국반도체디스플레이기술학회 2008 반도체디스플레이기술학회지 Vol.7 No.1
In this paper, the DE(double erosion) cathode for the reactive magnetron sputtering system is developed for high deposition rate and high target utilization efficiency. The utilization efficiency of the developed DE cathode is 22% higher than that of normal SE(single erosion) cathode. Sputtering process for the nickel oxide thin films with the DE cathode is performed under the following conditions; power with $1kW{\sim}3kW$, pressure with 4mtorr and 8mtorr, oxygen flow ratio with $0%{\sim}80%$. As a result, the hysteresis phenomenon of discharge voltage in 4mtorr is lower than that in 8mtorr and the hysteresis phenomenon of discharge voltage is getting lower as the applied power is getting higher. The structure of cross section and surface roughness of the thin films are observed by FE-SEM and AFM. The structure of cross section of the thin films is columnar and the average surface roughness under oxygen flow ratio of 0%, 52.5% and 65.0% are $2.08{\AA}$, $2.20{\AA}$ and $0.854{\AA}$, respectively.
姜榮浩,朴章植,金道聖 대한방사선방어학회 1982 방사선방어학회지 Vol.7 No.1
지표하에서 방출되는 토양기체중의 라돈농도 측정은 환경방사능, 우라늄 탐색, 지진예지 등에 관한 연구에 널리 이용되고 있다. 본 연구에서는 초산 셀룰로우즈(LR115-Type 2와 CA80-15, Kodak Pathe)와 CR-39의 플라스틱 비적 검출기를 부착한 라돈컵을 제작하여 경북일원에서의 토양기체중 라돈농도를 측정하였다. 제작한 다론컵내에는 일정량의 CaSO₄를 건조제로 사용하여 플라스틱 검출기에 미치는 습기의 영향을 감소시켰으며, 라돈컵의 라돈검출 환산인자는 1tr/㎠·30days=1.2.×10()pCi/L였다. 1981년 1월부터 1982년 2월 사이의 대구에서의 평균 라돈농도는 89.1pCi/L였다. 한편 1981년 8월부터 1982년 2월 사이의 대구, 안강, 경주, 포항, 청하, 안동에서의 평균 라돈농도는 각각 31.8pCi/L, 124.5pCi/L, 127.0pCi/L, 79.1pCi/L, 144.4pCi/L, 70.9pCi/L였으며, 이 결과를 TLD에 의한 환경방사능 측정치와 비교하였다. Measurement of the radon concentration close to the ground surface can be used in search of environmental radiation for human safety, exploration for uranium, premonitory signals from earthquakes. We can detect radons in soil gas by alpha particle track method using the plastic track detectors, cellulose nitrate(LR115-Type 2 and Ca80-15, Kodak Pathe) and CR-39. For present works, radon cups having these detectors were made in our laboratory and their conversion factor was determined. A typical conversion factor was 1tr/㎠·30days=1.2×10()pCi/L. In the radon cups, some of CaSO₄were used as desiccant form reducing the moisture effects on plastic track detectors. With these radon cups, underground radon concentrations of Kyungpook area were measured. Average radon concentration in Daegu from Jan. 1981 to Feb. 1982 was 39.7pCi/L. From Aug. 1981 to Feb. 1982, average radon concentration of Daegu, Angang, Kyungju, Pohang, Chungha, and Andong were 31.8pCi/L, 124.5pCi/L, 127.0pCi/L, 79.1pCi/L, 144.4pCi/L and 70.9pCi/L, respectively. The results were compared with the environmental radiation measured by TLD method.