UV/Cl₂(g)에 의한 Si-wafer 표면금속 오염물의 건식세정에 관한 연구

손동수,정광진,최성호,천희곤,조동율 울산대학교 1998 공학연구논문집 Vol.29 No.2

본 연구에서는 실리콘 웨이퍼 표면에 존재하는 미량의 Zn, Fe, Ti 금속 오염물들이 UV-excited chlorine radical을 이용한 건식세정 방법으로 제거되는 반응과정을 연구 하였다. 실리콘 웨이퍼 상에 진공증착법으로 원형패턴이 있는 Zn, Fe, Ti 박막을 증착시켜 상온 및 200℃에서 UV/CI₂세정하였을 때, 염소 래디컬(CI*)이 Fe, Zn, Ti와 반응하여 제거되는 것을 반응 전후 광학현미경과 SEM을 통해 표면 형상 변화를 관찰하였고, in-line으로 연결된 XPS를 통해서 반응 후 웨이퍼 표면에 남아있는 화합물의 화학적 결합상태를 관찰하였으며, UV/CI₂세정 후 실리콘 기판이 손상받는 정도를 알기 위해 AFM으로 표면 거칠기를 측정하였다. 광학현미경과 SEM의 분석에 의하면 Zn와 Fe는 쉽게 제거되는 반면 염화물을 형성하기 보다는 휘발성이 적은 산화물을 형성하는 경향이 강한 Ti은 약간만 제거되는 것을 확인하였다. XPS 분석을 통해서 이들 금속 오염물들이 chlorine radical과 반응하여 웨이퍼 표면에 금속 염화물을 형성하고 있는 것을 확인하였고, UV/CI₂세정처리를 하였을 때 실리콘 웨이퍼의 표면 거칠기가 약간 증가하는 것을 알 수 있었다. 지금까지의 결과를 통해 볼 때, 습식세정과 UV/CI₂건식세정을 병행하면 플라즈마 및 레이저를 사용하는 다른 건식세정 방법에 비하여 보다 저온에서 실리콘 기판의 큰 손상 없이 비교적 용이하게 금속 오염물을 제거할 수 있음을 알수 있었다. The reaction mechanisms of dry cleaning of Zn, Fe and Ti trace contaminants on the Si wafer using UV/CI₂ have been studied by SEM, AFM and XPS analyses. The patterned Zn, Fe and Ti films were deposited on the Si wafer surface by thermal evaporation and changes in the surface morphology after dry cleaning using CI₂and UV/CI₂at 200℃ were studied by optical microscopy and SEM. In addition changes in surface roughness of Si wafer by the cleaning was observed by AFM. The chemical bonding states of the Zn, Fe and Ti deposited silicon surface were observed with in-line XPS analysis. Zn and Fe were easily cleaned in the form of volatile zinc-chloride and iron-chloride as verified by the surface morphology changes. Ti which forms involatile oxides was not easily removed at room temperature but was slightly removed by UV/CI₂at elevated temperature of 200℃. It was also found that the surface roughness of the Si wafer increased after CI₂and UV/CI₂cleaning. Therefore, the metallic contaminants on the Si wafer can be easily removed at lower temperature by continuous processes of wet cleaning followed by UV/CI₂dry cleaning.

식이 단백질의 급원에 따른 당뇨쥐의 혈당 및 혈청지질에 미치는 영향

이수진,김영진,박수정,김희정,이윤희,유영상 동아시아식생활학회 1997 동아시아식생활학회지 Vol.7 No.2

This study was designed to find out the effects of soybean protein and milk protein between nondiabetic and diabetic rats. The experimental results are summarized as follows. 1. Total food intake was higher in diabetic soybean protein group than other groups but it was not significant. 2. The change of body weight was lower in diabetic soybean protein group than other groups and the soybean protein was effective to maintain the ideal body weight. 3. The effects of lowering total cholesterol and glucose in serum was higher in soybean protein groups than the milk protein groups.

설측 복합레진 색상이 치아 순측 색상에 미치는 영향

문승희,박수정,조현구,황윤찬,오원만,황인남 大韓齒科保存學會 2009 Restorative Dentistry & Endodontics Vol.34 No.4

본 연구는 순면 잔존 치질의 두께와 후방 복합레진의 색상이 최종 수복된 치아표면의 색상에 미치는 영향을 알아보고자 시행하였다. 배경판으로 사용될 복합레진은 Filtek Supreme (3M ESPE, St. Paul, U.S,A.)의 Al, A2, A6D, Bl, B2, B3,C1, C2 C6D를 선택하였다. 배경판으로 사용될 복합레진 시편은 직경 10 mm, 두께 4.5 mm로 각 shade당 한 개씩 제작하였다. 순면 잔존 치질은 상악 중절치 치관의 순면을 제외한 나머지 부위를 아크릴릭 레진을 이용하여 매몰 후 저속의 Diamond Wheel Saw (Isomet ; Buehler Ltd, Lake Bluff, U.S.A.)를 이용하여 주수 하에 순면으로부터 2.5 mm 두께로 절단하였다. 절단된 상아질측 표면을 2000번 사포로 연마하여 2.2 mm 두께의 시편을 얻었다. 분광광도계 Spectrolino^(Ⓡ) (Serial No. 3257-18522, GretagMacbeth, Regensdorf, Switzerland)를 이용하여 치아시편을 9개의 복합레진 시편위에 접촉면에 수분이 있는 상태로 위치시켜 치아 순면색상을 측정하였다. 그 후, 치아시편의 상아질 측면을 1.0 mm까지 0.3 mm 간격으로 연마하면서 복합레진 시편위에 위치시켜 동일한 방법으로 색상을 측정하였다. 모든 시편에서 L^(*)값과 b^(*)값은 배경색에 무관하게 치아시편의 두께가 두꺼워질수록 증가하는 양상을 보였으나(p <0.05), a^(*)값은 배경색에 무관하게 두께에 따른 유의한 차이를 보이지 않았다. In this study we evaluated the influence of both the thickness of residual enamel and the color of the composite resins applied to lingual surface on the labial surface color. Background plates were made by randomly (Al, A2, A6D, Bl, B2, B3, Cl, C2, C6D) selected colors of Filtek Supreme (3M ESPE, St. Paul, U.S.A.) composite resin. Crown portion of 9 maxillary central incisors were cut off and embedded with acrylic resin except labial surface. Samples of average thickness of 2.2 mm were obtained after cutting it in a thickness of 2.5 mm from the labial surface and sandpaper polish. The shade of composite resin background was measured using Spectrophotometer (Spectrolino^(Ⓡ), GretagMacbeth, Regensdorf, Switzerland). And CIE L^(*)a^(*)b^(*) value of 2.2 mm thickness tooth samples were measured on the 9 composite resin backgrounds. And then, the cutting side of tooth samples was ground to the extent of 1.9 mm, 1.6 mm, 1.3 mm, 1.0 mm and placed on composite resin backgrounds and measured L^(*)a^(*)b^(*) values with the same method. In all samples, L^(*) value and b^(*) value seemed to have a tendency of decreasing as thickness of tooth sample becomes thinner regardless of background colors (p < 0.05). But, a^(*) value didn't show the significant differences depending on the thickness.

Thiocholine ester 기질을 이용한 Acetylcholinesterase 활성부위의 구조특성

이천배,주은희,최수라,석대은,명평근 충남대학교 기초과학연구소 1999 忠南科學硏究誌 Vol.26 No.1

The inhibition pattern of three inhibitors(tacrine, decamethonium and propidium) on the hydrolysis of various thiocholine ester substrates by eel acetylcholinesterase was comparatively examined. When the substrate was acetylthiocholine, it showed a similar competitive inhibition by tacrine inhibitor, and a mixed type inhibition by decamethonium and propidium inhibitors. When the substrate was pentanoylthiocholine, it showed an uncompetitive inhibition by tacrine, and a noncompetitive inhibition by decamethonium. When the substrate was laurylthiocholine, it showed mixed type and uncompetitive inhibition by tacrine, and a competitive inhibition by decamethonium and propidium. Those results suggest that the active site of acetylcholinesterase has the existence of hydrophobic site besides the anionic and esteratic site.

Thiocholine ester 기질을 이용한 Acetylcholinesterase 활성부위의 구조특성

이천배,주은희,최수라,석대은,명평근 충남대학교 약학대학 의약품개발연구소 1999 藥學論文集 Vol.15 No.-

The inhibition pattern of three inhibitors(tacrine, decamethonium and propidium) on the hydrolysis of various thiocholine ester substrates by eel acetylcholinesterase was comparatively examined. When the substrate was acetylthiocholine, it showed a similar competitive inhibition by tacrine inhibitor, and a mixed type inhibition by decamethonium and propidium inhibitors. When the substrate was pentanoylthiocholine, it showed an uncompetitive inhibition by tacrine, and a noncompetitive inhibition by decamethonium. When the substrate was laurylthiocholine, it showed mixed type and uncompetitive inhibition by tacrine, and a competitive inhibition by decamethonium and propidium. Those results suggest that the active of acetylcholinesterase has the existence of hydorphobic site besides the anionic and esteratic site.

ESD(Electrospray Deposition)를 이용한 SU8 바이오센서 개발

김준완,김범준,히구찌토시로우,야마가따유따까,이원희,김동수,Kim, Jun-Wan,Kim, Beom-Jun,HiGuChi, Toshirowu,YaMaGaTa, Yutaka,Lee, Won-Hui,Kim, Dong-Su 재료연구소 2005 機械와 材料 Vol.17 No.1

내독소로 유도되는 Nuclear Factor Kappa B 활성화에 미치는 Src Family Kinase의 조절기전

김희재,이혜원,이희수,하종식,이지희 이화여자대학교 의과대학 2003 EMJ (Ewha medical journal) Vol.26 No.2

목적: Src family tyrosine kinases (TK)가 내독소로 인해 유도되는 NF-kB 활성화 신호전달체계에 연관되어 있음이 보고된 바 있다. 또한 내독소(LPS)나 TNF a와 같은 여러 자극제는 IkB-a 의 serine기 또는 tyrosine기의 인산화를 통하여 NF-kB를 활성화 시킨다고 알려진 바 있다. 이에 본 연구에서는 RAW 264.7 대식세포에 내독소 투여 시 유도되는 NF-kB활성화 및 NF-kB 의존성 염증성인자 생성에 대한 Src TK의 역할에 대해 규명하고자 한다. 방법: American Type Culture Collection 에서 구입한 생쥐의 대식세포, RAW264.를 내독소(LPS)에 노출시킨 후 damnacanthal나 PP1을 처리하여, EMSA, Nitrite assay, Western blot을 통하여Src TK가 NF-kB활성과 염증인자의 생성에 있어서 어떤 역할을 하는지에 대하여 조사하였고 내독소 투여로 인한 NF-kB활성에 있어서 Src TK의 기본적인 작용기전에 대해 조사하였다. 결과: Damnacanthal이나 PP1은 Src TK 특이적 억제제로 알려져 있는데, 본 연구에서는 Src TK의 특이적 억제제인 damnacanthal 이나 PP1을 사용하였고, RAW 264.7 대식세포에서 Src TK 특이 억제제의 전처치는 내독소로 유도되는 NF-kB활성을 차단시켰다. 또한 내독소 투여로 증가된 NO 생성은 damnacanthal이나 PP1에 의하여 억제되었다. 이런 TK kinase 억제제는 내독소로 유도되는 serine 기 인산화와 IkB-a 분해를 억제시켰다. 결론: Src kinase 특이적 억제제인 damnacanthal 그리고 PP1이 RAW 264.7세포에서 내독소로 유도되는 NF-kB활성과 Nitric Oxide 생성을 차단시켰다. 또한. Damna-canthal이나 PP1은 내독소로 유도된 serine기 인산화와 IkB-a의 분해를 억제시켰다. Objectives : Src family tyrosine kinases(TK) have been found to be involved in LPS induc-tion of signal cascades. Furthermore Lipopolysaccharide(LPS) or Tumor necrosis factor alpha (TNF-a) activate nuclear transcription factor kB(NF-kB) by inducing serine or tyrosine pho-sphorylation of the inhibitory subunit of NF-k B(I k B- a). In this study, it is our purpose to search the role of Src TK in LPS induced activation of NF-k B and NF-k B dependent induced inflam-matory factors. Methods : Nuclear extracts were prepared from RAW 264.7 cells pretreated with damnacan-thal or PP1 and then stimulate with LPS. After that, we figured out the dffects of inhibition of Src family kinases on LPS-induced activation of NF-kB by EMSA. We investigated effects of damnacanthal of PP1 on the production of NO by Griess assay and LPS-induced serine phos-phorylation and degradation of Ik B-a by Western blots in LPS-stimulated RAW263.7 cells. Results : Inhibition of Src TK with damnacanthal or PP1 blocked LPS-induced NF-kB acti-vation at the range of nanomolar concentrations. Substantial inhibition in LPS-induced production of NO was also observed in cells treated with damnacanthal or PP1. These kinase inhibitors blocked LPS-induced the serine phosphorylation, and the degradation of Ik B-a. Conclusion : we investigated the role of Src TK in NF-k B activation and production of nitric oxide (NO) in LPS stimulated RAW 264.7 macrophages and the underlying mechanism by which Src TK play a role in LPS-induction of the possible pathways leading to NF-k B activation. Src kinase specific inhibitors, damnacanthal and PP1 blocked LPS induced activating NF-k B and producing Nitric Oxide in Raw 264.7 machrophages. Moreover, Damnacanthal and PP1 inhibited LPS induced serine phosphorylation and degradation of Ik B-a.

두부 손상이 골절 칭 촉진 시동물 모델 및 유전자 발현 분석

김경희,김학선,문성환,김향,권언해,이환모,박희완,한수봉,문은수 대한정형외과연구학회 2003 대한정형외과연구학회지 Vol.6 No.2

Associations Between Age, Cytogenetics, FLT3-ITD, and Marrow Leukemia Cells Identified by Flow Cytometry

Su, Long,Gao, Su-Jun,Tan, Ye-Hui,Han, Wei,Li, Wei Asian Pacific Journal of Cancer Prevention 2013 Asian Pacific journal of cancer prevention Vol.14 No.9

Objectives: To explore the relationships between age, cytogenetic subgroups, molecular markers, and cells with leukemic aberrant immunophenotype in patients with acute myeloid leukemia (AML). Methods: In this study, we evaluated the correlations between age, cytogenetic subgroups (normal, balanced and unbalance karyotype), molecular mutations (NPM1, FLT3-ITD, and CEBPA mutations) and marrow leukemia cells (LC) identified by flow cytometry in 256 patients with de novo AML. Results: From age group 10-19 years to age group ${\geq}60$ years, the percentage of LC decreased from $67.0{\pm}18.4%$ to $49.0{\pm}25.1%$ (F=2.353, P=0.041). LC percentage was higher in patients with balanced karyotypes ($65.7{\pm}22.4%$), than those with unbalanced karyotypes ($46.0{\pm}26.6%$) (u=3.444, P=0.001) or a normal karyotype ($49.9{\pm}22.1%$) (u=5.093, P<0.001). Patients with FLT3-ITD ($64.3{\pm}19.5%$) had higher LC percentages compared with those without ($54.2{\pm}24.3%$) (u=2.794, P=0.007). Conclusions: Associations between age, cytogenetics, molecular markers, and marrow leukemia cells may offer beneficial information to understand the biology and pathogenesis of AML.

Dopamine and muscarinic acetylcholine receptor regulatory effect of active metabolite of icariin

Su Hui Seong,Seo Hyun Kim,Hyun Ah Jung,Jae Sue Choi 한국식품영양과학회 2022 한국식품영양과학회 학술대회발표집 Vol.2022 No.10