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        Ion-induced emission microscopies

        B.L.Doyle,D.S.Walsh,G.Vizkelethy,P.Rossi,F.D.McDaniel,T.Schenkel,J.McDonald,A.V.Hamza 한국물리학회 2003 Current Applied Physics Vol.3 No.1

        New emission-based MeV nuclear microscopies have been in the process of development for the past four years. These techniques all fall under the heading of ion-induced emission microscopy (I-IEM), and the first to be developed was ion-electron emission microscopy (IEEM). With I-IEM the ion beam is not focused, but instead, secondary particles emitted when a single-ion strikes the sample are projected at great magnification onto a high efficiency single particle detector generating position signals. These X and Y signals are then put into coincidence with other signals made by this same ion in a fashion completely analogous to traditional nuclear microprobe analysis. In this paper, we update the current state of I-IEMs, which currently includes IEEM and highly charged ion-secondary ion mass spectroscopy (HCI-SIMS or IIEM) and ion-photon emission microscopy. At the present time none of these microscopies have atomic resolution, but the potential exists for resolution adequate for many scientific and nanotechnology applications. 2002 Elsevier Science B.V. All rights reserved.

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