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RF Plasma Nitriding of AISI 304 Stainless Steel
Sun Kyu Kim,Jung Sik Yoo,Matthew P. Fewell 한국표면공학회 2004 한국표면공학회지 Vol.37 No.1
Austenitic stainless steel AISI 304 was nitrided in a low-pressure RF plasma using pure nitrogen. With a treatment of time of 4.0 h at 400℃, the nitrogen-rich layer on the sample was 3 ㎛ thick and had a hardness of approximately 4.4 times higher than that of untreated material. XRD data showed that as the process temperature rose from 350~450℃, the expanded austenite peaks became more prominent while the austenite peaks became weaker. Expanded austenite was transformed to ferrite and CrN at the treatment of 500℃. Langmuir probe measurements showed that electron density decreased above 450℃.