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Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Yu-Lin Kuo,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.3
In this study, we investigated the thermal stability, wettability, adhesion and reliability of (Ti,Zr)Nx films used as the diffusion barrier between Cu and Si. (Ti,Zr)Nx films were prepared by DC reactive magnetron sputtering from a Ti-5 at. % Zr alloy target in N2/Ar gas mixtures. A minimum film resistivity of 59.3 μΩ cm was obtained at an N2/Ar flow ratio of 2.75, which corresponds to the near stoichiometric composition (N/(Ti,Zr) ratio ~0.95). The sheet resistance of Cu/(Ti,Zr)N0.95/Si was not significantly increased until annealing above 750°C, indicating good thermal stability. On the other hand, the adhesion energy between Cu and the (Ti,Zr)Nx film was reduced as the N/Ti ratio was increased. To obtain reliable performance on stress-induced-voiding (SIV) and electromigration (EM) tests, we proposed to use (Ti,Zr)/(Ti,Zr)Nx/(Ti,Zr) tri-layers. We suggest that the interfacial adhesion between barrier and Cu plays an important role in reliability. The proposed tri-layer structure may be a promising candidate for a barrier, as it exhibits excellent reliability without increasing resistance.
Study of Feature-Based Image Capturing and Recognition Algorithm
Chih-Hong Kao,Sheng-Ping Hsieh,Chih-Cheng Peng 제어로봇시스템학회 2010 제어로봇시스템학회 국제학술대회 논문집 Vol.2010 No.10
In the field of applied computer vision, the three-dimensional (3D) object recognition is a very important technique which can be used to determine objects from a certain direction of the image for arbitrary 3D objects. These skills are useful in military applications, such as moving target recognition and coastal surveillance. Computer vision recognition allows fast response and all day long reconnaissance. The purpose of establishing a ship recognition system is to research and develop effective ship contour capture in the natural sea environment. We can develop a ship recognition system that is reliable and fast based on a database of ship images. We propose a recognition algorithm for ship images. This system utilizes gradient vector flow to capture the ship image contour first and calculates the geometric eigenvalue using this contour and Fourier descriptor. The eigenvalues are used to perform separate rough and detailed recognition. A graphic user interface is developed and the validity of the proposed technique is demonstrated using identifying images.
Preparation and characterization of Y-TZP powders coated with alumina
Chih-Cheng Chen,Shu-Wei Hsu,Hsing-I Hsiang 한양대학교 세라믹연구소 2008 Journal of Ceramic Processing Research Vol.9 No.2
In this study, alumina was coated onto yttria tetragonally stabilized zirconia (Y-TZP)core powder using aluminum nitrate with urea in an aqueous solution. Boehmite coating onto the surface of Y-TZP powders was confirmed using transmission electron microscopy (TEM), energy dispersive spectroscopy (EDS), Fourier transform infrared (FTIR) spectroscopy and zeta potential measurements. The sintering behaviors of Y-TZP powders with and without an alumina coating were investigated using a dilatometer and scanning electron microscopy (SEM). Boehmite coating onto the surface of Y-TZP powders significantly improved the densification of the resulting ceramic bodies. The relative density of the Y-TZP with a boehmite coating sintered at 1350oC can reach 97.3%. In this study, alumina was coated onto yttria tetragonally stabilized zirconia (Y-TZP)core powder using aluminum nitrate with urea in an aqueous solution. Boehmite coating onto the surface of Y-TZP powders was confirmed using transmission electron microscopy (TEM), energy dispersive spectroscopy (EDS), Fourier transform infrared (FTIR) spectroscopy and zeta potential measurements. The sintering behaviors of Y-TZP powders with and without an alumina coating were investigated using a dilatometer and scanning electron microscopy (SEM). Boehmite coating onto the surface of Y-TZP powders significantly improved the densification of the resulting ceramic bodies. The relative density of the Y-TZP with a boehmite coating sintered at 1350oC can reach 97.3%.
Effect of a Carbon Additive on the TbCu7-type Melt-spun Sm(Co, M)7 (M=Ti, Zr, Hf, V and Ge) Ribbons
Chih-Chieh Hsieh,Shih-Teng Huang,Jin-Sheng Guo,Chih-Wei Shih,Wen-Cheng Chang,Huang-Wei Chang,Chun-Chung Shaw 한국물리학회 2013 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.63 No.3
The effect of a carbon additive on the microstructure and the magnetic properties of melt-spunSmCo7−xMxCy (M=Ti, Zr, Hf, V and Ge; x = 0 - 0.3 and y = 0 - 0.1) ribbons was studied. Based on the XRD and the TEM analyses, a pure 1:7 phase could be formed for the C-containingribbons with M= Ti and Ge. However, carbide phases, i.e., Sm2C3 for M=Zr and Hf, and SmCoC2for M=V, respectively, were found. Nevertheless, a slight C addition may effectively refine themicrostructure and improve both the intrinsic coercvity and the magnetic energy product in all thestudied ribbons. Among them, the SmCo6.9V0.1C0.1 ribbons with r = 58.7 emu/g, iHc = 13.5kOe and (BH)max = 9.3 MGOe, and the SmCo6.9Hf0.1C0.1 ribbons with r = 61.6 emu/g, iHc =11.8 kOe and (BH)max = 10.3 MGOe are most suitable for the bonded magnet applications.
Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Hsing-An Huang,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2013 ELECTRONIC MATERIALS LETTERS Vol.9 No.5
NbN films were prepared by radio frequency reactive magnetron sputtering and then employed as diffusion barriers between Cu and Si. The microstructure of the NbN films was an assembly of very small columnar crystallites with a cubic structure. To investigate the properties as diffusion barriers, we performed metallurgical reactions of Cu/NbN0.8/Si, Cu/Nb/Si and Cu/TaN0.7/Si for comparisons. The sheet resistance increased dramatically after annealing above 750°C for Cu/NbN0.80/Si, and above 500°C for both Cu/Nb/Si and Cu/TaN0.7/Si. The interfaces were deteriorated seriously and formation of Cu3Si was observed when the sheet resistance was significantly increased. The diffusion coefficient of Cu in NbN barrier films was estimated by using the change of resistance (ΔRs/Rs %). Compared with TaN0.7, NbN0.8 films possess larger grain size and lower Cu diffusion coefficient. Our results suggest that the NbN film can be used as a diffusion barrier for Cu metallization as compared to the well-known TaN film.
Cheng-Chang Chang,Hui-Chen Wang,Yu-Ping Liao,Yu-Chih Chen,Yu-Chun Weng,Mu-Hsien Yu,Hung-Cheng Lai 대한부인종양학회 2018 Journal of Gynecologic Oncology Vol.29 No.1
Objective: We hypothesized that DNA methylation of development-related genes may occur in endometrial cancer (EC)/ovarian cancer (OC) and may be detected in cervical scrapings. Methods: We tested methylation status by quantitative methylation-specific polymerase chain reaction for 14 genes in DNA pools of endometrial and OC tissues. Tissues of EC/normal endometrium, OC/normal ovary, were verified in training set using cervical scrapings of 10 EC/10 OC patients and 10 controls, and further validated in the testing set using independent cervical scrapings in 30 EC/30 OC patients and 30 controls. We generated cutoff values of methylation index (M-index) from cervical scrapings to distinguish between cancer patients and control. Sensitivity/specificity of DNA methylation biomarkers in detecting EC and OC was calculated. Results: Of 14 genes, 4 (PTGDR, HS3ST2, POU4F3, MAGI2) showed hypermethylation in EC and OC tissues, and were verified in training set. POU4F3 and MAGI2 exhibited hypermethylation in training set were validated in independent cases. The mean M-index of POU4F3 is 78.28 in EC and 20.36 in OC, which are higher than that in controls (6.59; p<0.001 and p=0.100, respectively), and that of MAGI2 is 246.0 in EC and 12.2 in OC, which is significantly higher that than in controls (2.85; p<0.001 and p=0.480, respectively). Sensitivity and specificity of POU4F3/MAGI2 were 83%–90% and 69%–75% for detection of EC, and 61% and 62%–69% for the detection of OC. Conclusion: The findings demonstrate the potential of EC/OC detection through testing for DNA methylation in cervical scrapings.
Chih-Cheng Chen,Hsing-I Hsiang,Fu-Su Yen 한양대학교 세라믹연구소 2008 Journal of Ceramic Processing Research Vol.9 No.1
In this study, the effects of aging on the crystalline phases, crystallite sizes and sintering properties of coprecipitated Al₂O₃- ZrO₂ powders are investigated using thermogravimetry (TG), differential thermal analysis (DTA), X-ray diffractometry (XRD), dilatometry, scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Coprecipitated Al₂O₃- ZrO₂ powder aging in the solution promoted the dissolution and reprecipitation process, which resulted in the boehmite structure subsequently transforming into bayerite. The densification and microstructural development of the coprecipitated Al₂O₃-ZrO₂ powders were dependent upon the aging time which shifted the θ→α-Al₂O₃ phase transformation to a higher temperature, lowered the crystallite growth rate, and prevented the occurrence of intragranular ZrO₂ particles during sintering. In this study, the effects of aging on the crystalline phases, crystallite sizes and sintering properties of coprecipitated Al₂O₃- ZrO₂ powders are investigated using thermogravimetry (TG), differential thermal analysis (DTA), X-ray diffractometry (XRD), dilatometry, scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Coprecipitated Al₂O₃- ZrO₂ powder aging in the solution promoted the dissolution and reprecipitation process, which resulted in the boehmite structure subsequently transforming into bayerite. The densification and microstructural development of the coprecipitated Al₂O₃-ZrO₂ powders were dependent upon the aging time which shifted the θ→α-Al₂O₃ phase transformation to a higher temperature, lowered the crystallite growth rate, and prevented the occurrence of intragranular ZrO₂ particles during sintering.