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광대역 표면탄성파 구현을 위한 slanted 및 chirp IDT의 최적화
이태윤(Tae-Yoon Lee),푸첸(Chen Fu),이기근(Kee-Keun Lee) 대한전기학회 2013 전기학회논문지 Vol.62 No.12
Slanted and chirp interdigital transducer(IDT) configurations were studied for generating the surface acoustic wave(SAW) with wide bandwidths on a piezoelectric substrate. These devices can be applied to manipulate optical path of light along the waveguide, ultimately used for optical switches and holographic image implementation. Prior to fabrication, the coupling of modes(COM) modeling and simulation were performed to extract optimal design parameters. The optimally designed wideband device showed wide bandwidth of 30MHz, low insertion loss of -25dB, and abrupt side suppression ratio (SSR). Several design conditions were determined during device implementation, such as slanted angle, aperture length, number of fingers, and central frequencies of IDTs. These factors were experimentally analyzed and described in details in this paper.