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표대승 ( Dae Seong Pyo ),조준환 ( Jun Hwan Jo ),홍표환 ( Pyo Hwan Hong ),이종현 ( Jong Hyun Lee ),김봉환 ( Bong Hwan Kim ),조찬섭 ( Chan Seob Cho ) 한국센서학회 2013 센서학회지 Vol.22 No.6
In this paper, we found surface shapes are affected by several parameters of RIE, such as RF power, pressure, temp, and process times. The reflectance of pyramid and half sphere structures show differences among shapes, size, height, and depth of those structures. We made about 1㎛ pyramid and half sphere shapes of silicon surface with RIE. For comparing the reflectance, pyramid and half sphere structures are fabricated with same height. Pyramid structure cell shows higher cell efficiency of 12.5% by 1.1% than one of half sphere structure of 11.4%. The light absorption is more increased through the pyramid structure than half sphere structure.
다양한 동작신호의 사용에 따른 연동형 마이크로 펌프의 성능 향상
홍표환 ( Pyo Hwan Hong ),정동건 ( Dong Geon Jung ),표대승 ( Dae Seong Pyo ),이종현 ( Jong Hyun Lee ),조찬섭 ( Chan Seob Cho ),김봉환 ( Bong Hwan Kim ) 한국센서학회 2013 센서학회지 Vol.22 No.6
This paper described the development of electrostatically driven peristaltic micropump. The proposed micropump consists of a flexible membrane and a single chamber which electrodes are inserted. The single chamber is divided into smaller cells by the electrodes. The fabricated micropump was operated with four electrodes in the membrane and a various phase sequencing actuation. We studied the changes in the flow rate corresponding to the actuating signal applied to the micropump under the zero hydraulic pressure difference between lnlet port and outlet port. The pump was operated from 60 to 130 V. Whereas the maximum flow rate in basic actuating signal is about 83 μ1/min at 15 Hz, the maximum flow rate in optimized actuating signal is about 114 μl/min at 10 Hz.