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원창수(Chang-Su Won),박지만(Ji-Mann Park),정원섭(Won-Sup Chung),손상희(Sang-Hee Son),최창억(Chang-Auck Choi) 한국정보기술학회 2009 한국정보기술학회논문지 Vol.7 No.2
A differential capacitance deviation-to-time converter for interfacing position sensor is presented. It consists of triaxial position sensors, six comparators, six current mirrors, a control logic, a 12-bit counter, and a 16-bit latch. The proposed differential capacitance deviation-to-time interval converter has been simulated using Magna Chip 0.35-㎛ CMOS parameters. The simulation results show that the linearity error is less than ±0.0015 % and the conversion sensitivity amounting to 100.556 ㎲/pF when the capacitance deviation range of the sensor was from 0 pF to 1 pF. Maximum conversion time of the converter is about 350 ㎲ when capacitance deviation of the sensor was 1 pF.
BCl<sub>3</sub>/Ar 유도결합 플라즈마 안에 CH<sub>4</sub> 가스 첨가에 따른 건식 식각된 TaN 박막 표면의 연구
우종창,최창억,양우석,주영희,강필승,전윤수,김창일,Woo, Jong-Chang,Choi, Chang-Auck,Yang, Woo-Seok,Joo, Young-Hee,Kang, Pil-Seung,Chun, Yoon-Soo,Kim, Chang-Il 한국전기전자재료학회 2013 전기전자재료학회논문지 Vol.26 No.5
In this study, the plasma etching of the TaN thin film with $CH_4/BCl_3/Ar$ gas chemistries was investigated. The etch rate of the TaN thin film and the etch selectivity of TaN to $SiO_2$ was studied as a function of the process parameters, including the amount of $CH_4$. X-ray photoelectron spectroscopy (XPS) and Field-emission scanning electron microscopy (FE-SEM) was used to investigate the chemical states of the surface of the TaN thin film.
플라즈마 ALD법에 의해 제조된 마이크로볼로미터용 바나듐 산화막의 제작 및 특성
윤형선,정순원,정상현,김광호,최창억,유병곤,Yun, Hyeong-Seon,Jung, Soon-Won,Jeong, Sang-Hyun,Kim, Kwang-Ho,Choi, Chang-Auck,Yu, Byoung-Gon 한국전기전자재료학회 2008 전기전자재료학회논문지 Vol.21 No.2
The fabrication of vanadium oxide films directly on Si(100) substrates by plasma atomic layer deposition(ALD) with vanadium oxytriisopropoxide(VOIP) and oxygen as the reactants have been performed at temperature ranging from 250 to $450^{\circ}C$. Growth rate of vanadium oxide was $2.8{\AA}$/cycle at $300{\sim}400^{\circ}C$ defined as ALD acceptable temperature window, Vanadium oxide has been shown the different phases at $250^{\circ}C$ and more than $300^{\circ}C$. It has been confirmed that the phase of the films deposited at $250^{\circ}C\;was\;V_2O_5$ type and that of the films above $300^{\circ}C\;was\;VO_2(T)$ type measured at room temperature, respectively. A large change in resistance and small temperature hysteresis corresponding to a temperature has been observed in the vanadium oxide film deposited at temperature $350^{\circ}C$.
Infrared Focal Plane Array 용 MEMS 구조체 개발
曺星穆(Seong M. Cho),梁佑碩(Woo Seok Yang),柳浩駿(Ho Jun Ryu),田尙勳(Sang Hoon Cheon),兪炳坤(Byoung-Gon Yu),崔昌億(Chang Auck Choi) 대한전기학회 2007 전기학회논문지 Vol.56 No.8
A micromachined sensor part for an infrared focal plane array has been designed and fabricated. Amorphous silicon was adapted as a sensing material, and silicon nitride was used as a membrane material. To get a good efficiency of infrared absorption, the sensor was made as a λ/4 cavity structure. All the processes were done in 0.5 ㎛ iMEMS fab. in the Electronics and Telecommunication Research Institute (ETRI). The processed MEMS sensor structure had a small membrane deflection less than 0.3 ㎛. This excellent deflection property can be attributed to the rigorous balancing of the stresses of individual layers. The efficiency of infrared absorption was more than 75% in the wavelength range 8 - 14 ㎛.
개인 휴대 단말기 (PDA)를 기반으로 한 휴대용 E-Nose의 개발
양윤석 ( Yoon Seok Yang ),김용신 ( Yong Shin Kim ),하승철 ( Seung Chul Ha ),김용준 ( Yong Jun Kim ),조성목 ( Seong Mok Cho ),표현봉 ( Hyeon Bong Pyo ),최창억 ( Chang Auck Choi ) 한국센서학회 2005 센서학회지 Vol.14 No.2
N/A The electronic nose (e-nose) has been used in food industry and quality controls in plastic packaging. Recently it finds its applications in medical diagnosis, specifically on detection of diabetes, pulmonary or gastrointestinal problem, or infections by examining odors in the breath or tissues with its odor characterizing ability. Moreover, the use of portable e-nose enables the on-site measurements and analysis of vapors without extra gas-sampling units. This is expected to widen the application of the e-nose in various fields including point-of-care-test or e-health. In this study, a PDA-based portable e-nose was developed using micro-machined gas sensor array and miniaturized electronic interfaces. The rich capacities of the PDA in its computing power and various interfaces are expected to provide the rapid and application specific development of the diagnostic devices, and easy connection to other facilities through information technology (IT) infra. For performance verification of the developed portable e-nose system, Six different vapors were measured using the system. Seven different carbon-black polymer composites were used for the sensor array. The results showed the reproducibility of the measured data and the distinguishable patterns between the vapor species. Additionally, the application of two typical pattern recognition algorithms verified the possibility of the automatic vapor recognition from the portable measurements. These validated the portable e-nose based on PDA developed in this study.