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박막의 두께에 따른 잔류 응력이 나노 패턴의 무너짐에 미치는 영향에 대한 연구
김범래(Beom Rae Kim),문성남(Sung Nam Moon),정재민(Jae Min Jung),최성학(Sung Hak Choi),이우일(Woo Il Lee) 대한기계학회 2013 대한기계학회 춘추학술대회 Vol.2013 No.12
After Nano Imprint Lithography (NIL) process, the collapse of imprinted nano patterns which are major problem for pattern fidelity is commonly found. We assumed that insufficient relaxation time and the initial stress of polymer resist on which the pattern is imprinted have a relation with that collapse phenomenon. In this study, therefore, we measured the stress of polymer nano films for the different film thickness by varying spin-coating speed. The results show that the stress of PMMA film was found to decrease with increasing film thickness and the patterns was rapidly collapsed when the stress-thickness ratio increased.
최성학,이정호,오석환 인제대학교 1985 仁濟醫學 Vol.6 No.1
만성 알코올리즘 환자의 치료 방법 중 혐기요법의 하나로 Disulfiram요법을 시행하여 뇌증후군 및 정신병적인 증상을 일으킨 1예와, 금주 목적으로 의사의 지시없이 Disulfiram만을 복용하여 급성 정신증상을 유발한 1예를 치험하였기에 보고한다. It is well known that disulfiram therapy may result in psychosis, organic brain syndrome, and peripheral neuropathy, additional to the wanted effects of the drug. We experienced two cases of psychoses in chronic alcoholisms who had no past history of psychosis: one; organic brain syndrome and psychotic symptoms resulted from the therapy, the other, acute psychotic symptoms resulted from arbitral taking of disulfiram only, aimed to stop drinking. It is said that the symptoms will disappear only by stopping the medication. Therefore, we assume that disulfiram therapy can be effective as the adjunctive therapy only when it is tried by physicians, and that arbitual usage by general population should be restrained.