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정현수(Hyun Soo Jung),이성민(Seong-Min Lee),홍민성(Min-Sung Hong),이수훈(Soo-Hun Lee),박준호(June Ho Park),강동우(Dongwoo Kang),이문구(Moon G. Lee) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
There are increasing needs to inspect micro-pattern of flat panel display (FPD) device such as PDP and LCD. The inspection system should be able to measure over large size mother glass with high productivity and accuracy. Stylus profilers are adopted as an inspection system. To scan over large and heavy FPD device specimen, a “tip-scanning” head for stylus profiler is required. A simple method to realize a tip-scanning system is to miniaturize the whole scanning unit. In this study, a novel stylus profiler is proposed as a tip-scanning stylus profiler. A novel stylus profiler has leaf spring instead of conventional lever & pivot. To measure position of stylus optical senor is used. Linear variable differential transformer is applied to feed-back scanning stage displacement. The stage is actuated by a voice coil motor (VCM). Target performances of the stylus profiler head are stroke over 20㎜ and high accuracy. Specifications of xy-scanning stage are stroke over 250㎜×250㎜ and high bandwidth over 20Hz. The magnetic and elastic characteristics of the mechanism are designed based on finite element (FE) analysis. After fabrication of the head and stage, they are integrated. Current amplifier and feedback controller are also developed. The performance of the stylus profiler is also validated by inspecting standard sample.
마이크로 부품 조립을 위한 평면 3-PRP 정렬기의 역기구학
이정재(Jeong-Jae Lee),유용환(Young-Hwan Yoo),이창우(Chang-Woo Lee),송준엽(Jun Yeob Song),이수훈(Soo-Hun Lee),홍민성(Min-Sung Hong),이문구(Moon G. Lee) 한국생산제조학회 2010 한국공작기계학회 추계학술대회논문집 Vol.2010 No.-
In the field of micro-factory, there are demanded on aligning micro-components when they assemble an automatic focusing actuator of camera module for cellular phone and mount a dental crown on artificial root. This paper presents inverse kinematics of three degree-of-freedom (DOF) planar parallel actuated manipulators for the alignment. The 3-PRP (Prismatic-Revolute-Prismatic) manipulator is actuated by the voice coil motors (VCMs). The actuators are arrayed 120° apart symmetrically on the horizontal plate. Numerical simulation of the kinematical motion of 3-PRP manipulator is performed by using inverse kinematics. Furthermore, based on these results, the working range of the manipulator is estimated before experiments. Also, this paper presents control algorithm to drive the manipulator. The control algorithm is using a feedback control based on the inverse kinematics, sensor kinematics and governing equation of VCM. The algorithm controls each VCM independently.
열방식 마이크로 임프린트 공정을 위한 고분자 재료의 수치적 모델링과 해석
란 슈하이(Shuhuai Lan),이수훈(Soo-Hun Lee),이혜진(Hye-Jin Lee),송정한(Jung-Han Song),성연욱(Yeon-Wook Sung),김무종(Moojong Kim),이문구(Moon G. Lee) 한국소성가공학회 2009 한국소성가공학회 학술대회 논문집 Vol.2009 No.10
The research on miniature devices based on non-silicon materials, in particular polymeric materials has been attracting more and more attention in the research field of the micro/nano fabrication in recent years. Lost of applications and many literatures have been reported. However, the study on the micro thermal imprint process of glassy polymer is still not systematic and inadequate. The aim of this research I to obtain a numerical material model for an amorphous glassy polymer, polycarbonate (PC), which can be used in finite element analysis (FEA) of the micro thermal imprint process near the glass transition temperature (Tg). An understanding of the deformation behavior of the PC specimens was acquired by performing tensile stress relaxation tests. The viscoelastic material model based on generalized Maxwell model was introduced for the material near Tg to establish the FE model based on the commercial FEA code ABAQUS/Standard with a suitable set of parameters obtained for this material model form the test data. As a result, the feasibility of the established viscoelastic model for PC near Tg was confirmed and this material model can be used in FE analysis for the prediction and improvement of the micro thermal imprint process for pattern replication.