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이동욱(Lee Dong-Wook),강한빈(Kang Han-Bin),백인석(Pack In-Seok),송주한(Song Ju-Han),박민혁(Park Min-Hyeok),이석순(Lee Seok-Soon) 대한기계학회 2013 대한기계학회 춘추학술대회 Vol.2013 No.5
Displacement measurement system using fiber optical common-pathinterferometry method was developed. The measurement system is made with fiber opticaldevices and a collimeterattached on a linear translation stage. The interferometry effect was detected with a phpto detector and its signal was measured on an oscilloscope. During the measurement experiment, wefound that the vibration effect in the stage caused the signal disturbance due to the nanoscale interference effect. In the stable experiment condition, we got that the measured distance was the almost the same as the given value in the linear translate stage.