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Development of Chemical Drum Auto-connection Device
S. B. Park(박시백),J. H. Maeng(맹주하),J. H. So(소진호),H. S. Kim(김현식),M. Y. Kim(김민영),W. J. Jeong(정우진) Korean Society for Precision Engineering 2021 한국정밀공학회 학술발표대회 논문집 Vol.2021 No.11월
The filling method using tank lorry and drum is used to input chemicals in the semiconductor industry. Among them, the filling through the drum is fastened with a coupler for filling by a worker equipped with chemical protective equipment. This work is highly dangerous because it can be directly exposed to chemicals and its fume. Therefore, this study aims to eliminate the risk by developing a chemical drum auto-connection module that can be installed in existing facilities that were done manually. The developed chemical drum auto-connection module is optimized to hedge only the dangerous work of opening and closing the drum cap and connecting the coupler so that cost-effectiveness is high within the range of not breaking the internal arrangement of the existing supply device. It has an automation module such as a base module (with Clamp) to fix the drum, a cap opening/closing module to open and close the drum cap, a key-code reading module unique to the drum to prevent incorrect injection of chemicals, and a coupler inserting module for filling. When the worker seats the module on the drum and connects the cap opening/closing module, the cap opening/closing and coupler inserting/taking-out work can be performed automatically.