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스퍼터링 챔버에 설치한 in - situ 타원해석기의 성능평가
박광범(K. B. Park),신용환(Y. H. Shin),구교근(K. K. Koo),이순일(S. Lee),김상열(S. Y. Kim),오수기(S. G. Oh) 한국진공학회(ASCT) 1994 Applied Science and Convergence Technology Vol.3 No.2
박막이 성장하는 동안 박막성장 상태를 관찰하기 위한 in-situ 타원해석기를 제작하였다. 이 타원해석기는 He-Ne 레이저를 광원으로 사용하며 회전검광자형으로 광량측정방식을 채택하였다. 이 타원해석기는 편광자 모듈과 검광자 모듈 및 제어부로 구성되어 있으며 이들 모듈은 각각 스퍼터링 챔버에 부착되었다. c-Si 기판 위에 열산화 과정으로 성장시킨 SiO₂ 박막을 표준시료로 사용하여 보정 및 성능평가를 하였다. 또한 RF 스퍼터링으로 c-Si 기판 위에 SiO₂ 박막을 성장시키면서 타원해석상수 ψ, △을 측정하고 근사적 모델에 의한 ψ, △의 전산모의 성장곡선과 비교해 보았다. An in-situ ellipsometer has been fabricated to monitor the film growth during each stage of film growth. This is a photometric type which measures the intensity modulation vs. the rotating analyzer, and consists of the polarizer module, the analyzer module and the control part with a He-Ne laser light source. The polarizer and the analyzer modules are mounted on a sputtering chamber. The calibration procedure has been carried out using the samples with thermally grown oxide on c-Si substrate. Also the ellipsometric constants of ψ and △ were measured while the SiO₂ were sputter-grown. The data are compared to the growth curve generated by the simulation program based on the optical model of SiO₂ on c-Si.
열수처리 시간에 따른 Ti-6Al-7Nh 합금의 생체활성 평가
권오성,최석규,박광범,이민호,배태성,이오연,Kwon O. S.,Choi S. K.,Park K. B.,Lee M. H.,Bae T. S.,Lee O. Y. 한국재료학회 2004 한국재료학회지 Vol.14 No.12
This study was to investigate whether the bioactivity of the anodized and hydrothermally treated Ti-6Al-7Nb alloy were affected by the time of hydrothermal treatment. Anodizing was performed at current density 30 $mA/cm^2$ up to 300 V in electrolyte solutions containing $DL-{\alpha}-glycerophosphate$ disodium salt hydrate $(DL-{\alpha}-GP)$ and calcium acetate (CA). Hydrothermal treatment was done at $300^{\circ}C$ for 30 min, 1 hr, 2 hrs, and 4 hrs to produce a thin film layer of hydroxyapatite (HA). The bioactivity was evaluated from HA formation on the surfaces in a Hanks' solution with pH 7.4 at $36.5^{\circ}C$ for 10, 20, and 30 days. Anodic oxide films were porous with pore size of $1\sim4{\mu}m\;and\;3\sim4{\mu}m$ thickness. The anodic oxide films composed with strong anatase peak with presence of rutile peak, and showed the increase in intensity of anatase peak after hydrothermal treatment. It was shown that the intensity of anatase peak increased with increasing the time of hydrothermal treatment but was no difference in rutile peak. The corrosion voltage was the highest in the group of hydrothermal treatment for 2 hrs (Ecorr: -338.6 mV). The bioactivity in Hank's solution was accelerated with increasing the time of hydrothermal treatment.