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반도체소자의 고속마킹검사를 위한 vision system 개발
노영동,주효남,김주식 湖西大學校 工業技術硏究所 2005 工業技術硏究所論文集 Vol.24 No.-
In this paper, we propose the high speed making/surface inspection algorithm, that use adaptive automatic acquisition algorithm and real time matching algorithm of model data. The proposed automatic acquisition algorithm to obtain the adaptive model data extracts the interesting regions to fit in semiconductor characteristics, and create models of several semiconductor regardless of position and type. The proposed teal time matching algorithm uses geometrical pattern matching method to minimize effect of external environment of making/surface and only use semiconductor characteristic information. The proposed system has faster processing time than the conventional method. Also the proposed one has a good performance.