현존 김려·김선 형제 저작의 문헌학적 재검토

김영진 ( Kim Young-jin ) 고려대학교 민족문화연구원 2023 民族文化硏究 Vol.98 No.-

본고는 조선후기 문학사에 뚜렷한 족적을 남겼던 金鑢·金䥧 형제의 저작 중 현존하는 필사본 이본들을 전면적으로 재검토하고 아울러 신자료를 소개하였다. 김려는 만년인 1818년에서 1821년 사이 자신의 시문과 지인 및 인척의 시문을 수합하여 『藫庭叢書』 34권 17책을 편찬하였다. 김려의 손자 김겸수는 이 총서 내의 김려의 시문만을 뽑고 또 육촌 김기수의 자료 협조를 얻어 보유를 첨부한 12권 6책의 목활자본 『藫庭遺藁』를 1882년에 간행하였다. 『담정총서』전질은 유일의 필사본이지만 『牛海異魚譜』및 김려의 傳은 轉寫本들이 현존하고 있다. 연세대에 소장된 『우해이어보』‘서여본’은 표제가 ‘玉曇書種’ 내제는 ‘담자외서’라고 되어 있고, 또 다른 『우해이어보』‘귀중본’은 표제가 ‘담정총서’, 내제는 역시 ‘담자외서’로 되어 있다. 이 ‘귀중본’에는 『우해이어보』 외에 김선·김선신·조면호 등의 시문이 필사되어 있는 바, 조면호가 김선의 제자였다는 점에서 조면호 또는 그 주변인이 필사한 책으로 보인다. 김려의 전 작품들은 『續齊諧志』(필사본 1책, 일본 천리도 서관), 『香半館藏書』(필사본 1책, 규장각) 등에도 실려있는 데, 일부 글자의 출입이 있다. 김려의 『思牖樂府』는 『담정총서』본과 성균관대 존경각 소장본에는 300수, 『담옹유고』에는 295수, 『담정유고』 목활자본에는 290수만 실려 있는 차이가 있다. 성균관대 소장 『담정유고』에는 「月巖權公行錄」 등 유배지 진해에서 지은 글 8편이 수록되어 있는데 이 8편 중 「慕先齋上樑文」과 「慕先齋記」만 목활자본 『담정유고』에 보인다. 김선의 경우 시문의 유실이 김려만큼이나 많은데, 필자는 그의 逸文으로 김선민의 『관연록』에 붙인 題後와 유배지인 초산에서 쓴 『초관만필』을 소개하였다. 김선의 경우 『담정총서』에 수록된 小集 이외의 글들이 전혀 발견되지 않아 蒐佚 작업이 더욱 절실하다고 하겠다. 향후 김려·김선 형제와 추사 김정희와의 교유의 정도, 영향관계가 고찰될 필요가 있다. 그 磁場 안에 李鈺, 金善臣, 金照, 趙冕鎬, 金綺秀 등 중요한 문인들이 포진해있는데, 이들은 19세기 문학사를 다채롭고 풍성하게 해줄 하나의 판이 될 것이다. This paper reviewed the existing manuscripts of the Kim-Ryeo and Kim-Seon brother who left a clear mark in the literary history of the late Joseon Dynasty and introduced new materials of them. Between 1818 and 1821, Kim-Ryeo compiled of 『Damjeongchongseo』 by collecting himself and his acquaintances and relatives’ poetry and literature. Kim Gyeom-soo, Kim-Ryeo’s grandson, selected only Kim Ryeo’s poetry in this book and published wooden movable type 『Damjeongyugo』 in 1882 with the cooperation of second cousin Kim Ki-su. The complete works of 『Damjeongchongseo』 is the only manuscript, but the transcripts of 『Woohaeiobo』 and Kim Ryeo’s biographies exist. A “valuable copy” of 『Woohaeiobo』 owned by Yonsei University include poems written by Kim-Seon, Kim Sun-shin, and Cho Myeon-ho. Considering Cho Myeon-ho was Kim-Seon’s student, I think Cho Myeon-ho or the people around him would have written this book. Kim-Ryeo’s works are also included in 『Sokjehaeji』and『Hyangbangwanjangseo』. Sungkyunkwan University’s 『Damjeongyugo』 contains 8 piece of works such as 「Wolamkwongonghaengrok」, 「Mosunjaesangrangmoon」, 「Mosunjaegi」 written in a place of exile Jinhae. Only 「Mosunjaesangrangmoon」 and 「Mosunjaegi」 are shown in the wooden movable type 『Damjeongyugo』. Also Kim-Seon’s inscription in Kim Sun-min’s 『Gwanyeonrok』 and 『Chogwanmanpil』 written in the exile site Chosan were excavated. In the future, it is necessary to consider the influence of the relationship between Kim -Ryeo and Kim-Seon brother and Chusa Kim Jeong-hee.

金鑢의 編書 활동과 交遊에 관한 몇 가지 신자료

김영진(Kim Young jin) 대동한문학회 2016 大東漢文學 Vol.47 No.-

본고는 담정총서 에 수록된 작가들의 인물정보와 그 자료 수집의 과정에 관한 자료들을 추가로 제시하고, 새로 발굴한 담정의 원고본과 필사본을 통해 담정유고 의 편집 과정을 논한 것이다. 담정총서 에 수록된 金愚淳 (1760~1835), 李友信(1762~1822), 金祖淳(1765~1832), 李濟魯(1789 ~1816), 金䥧(1772~1833), 惠藏(1772~1811), 李魯元(1756~1811),權常愼(1759~1824), 鄭彦學(1749~1818이후), 李鈺(1760~1815), 金善臣(1775~1846), 趙基復(1773~1839), 李安中(1752~1791), 李復鉉(1767~1853), 李濟殷(1784~1836)의 인적사항과 신발굴 자료를 보충하였다. 수록 문인들은 대체로 담정과 직접적으로나 혹은 간접적으로 교유관계가 있던 노론 시파(時派) 계열 인물들이 많고 김조순, 권상신, 김우순을 제외한 대부분은 관직에서 소외된 몰락하고 불우한 인물들이었다. 이들의 창작활동 공간은 주로 서울 주변이었음을 알 수 있다(예외적 인물은 아암 혜장). 전체 16명 중에서 9명이 부자나 형제 혹은 숙질의 관계로 연결되어있다. 즉 이옥, 김조순, 권상신, 김선신, 조기복, 정언학, 혜장 7명을 제외한 나머지 문인들은 인척관계를 형성하고 있어 담정총서 수록 작가와 그 작품이 同志的 결속보다는 혈연적 요소가 다소 강하게 작용하고 있음을 보여준다. 담정총서 는 ‘동시대(幷世)’ 의식의 일환으로 편찬되었다는 것, 그리고 이옥과 김조순, 그리고 김려 본인의 작품이 대변하고 있듯이 산문에서는 ‘패사소품’적 참신한 작품들이 대거 뽑혔다는 점과 한시에서는 옥대향렴체 등의 이 시기 또 이들 그룹의 경향을 대표하는 시풍이 선택된 점 등을 특징으로 들 수 있다. This paper shows writers in ｢A Series of DamJeung｣ and how these writers’ information is gathered. Also, it shows the editing process of ｢A Series of DamJeung｣ by referring newly discovered manuscript and original text. Here, I added these people’s personal data and other newly discovered materials: Kim Woo-soon(1760~1835), Lee Woo-sin(1762~1822), Kim Jo-soon(1765~1832), Lee Jae-noh(1789~1816), Kim-Rye(1772~1833), Hye-Jang(1772~1811), Lee Noh-won(1756~1811), Kwon Sang-sin(1759 ~1824), Jeong Uhn-hak(1749~after 1818), Lee Oak(1760~1815), Kim Seon-sin(1775~right after 1846), Jo Ki-bok(1773~ ), Lee An-joong(1752 ~1791), Lee Bok-hyun(1767~1853), Lee Jae-eun(1784~1836). These people are directly or indirectly related to the group of Noron Si-pa (時派) and almost all of them were unfortunate ones who did not get important positions except Kim Jo-soon, Kwon Sang-sin, and Kim Woo-soon. Of 16 people, 9 of them are family members. That is, the others excepting those people (Lee Oak, Kim Jo-soon, Kwon Sang-sin, Kim Seon-sin, Jo Ki-bok, Jeong Uhn-hak and Hye-Jang) have blood relationship, so it has much influence than mere friendship. The book ｢A Series of DamJeung｣ is written in the spirit of Byeongse(幷世) and there are some of points worth watching: As their works show, (Lee Oak, Kim Jo-soon, Kim-Rye) in prose, novel works are included, which shows a kind of ‘Pesasopum’ trait (a name of genre). As such, some of traits showing the trend of this era reveal in poems.

유산(酉山) 정학연(丁學淵)의 회인시 연구 -『추일회인절구십일수(秋日懷人絶句十一首)』를 중심으로-

김영진 ( Young Jin Kim ) 한국시가학회 2016 韓國 詩歌硏究 Vol.40 No.-

본고는 茶山 丁若鏞(1762~1836)의 장남 酉山 丁學淵(1783~1859)의 회인시 『秋日懷人絶句十一首』를 소개ㆍ분석하고 아울러 정학연의 장년기 교유를 탐색하였다. 『추일회인절구십일수』(『酉山集』, 필사본 1책, 개인 소장)는 현존하는 정학연의 시집에서 가장 이른 시기(1826~27년)에 창작된 회인시다. 李學逵(1770~1835), 權永佐(1782~1830), 柳最寬(1788~1843), 金正喜(1786~1856), 尹定鉉(1793~1874), 朴長암(1780년생), 韓晩植(자 菊老), 申緯(1769~1847), 李祖憲(1796~1862), 南聖執, 李魯榮(1781~1860) 총 11명의 인물을 다루고 있는데, 정학연이 회인시를 짓게 된 데는신위, 이학규와의 교유(상호 시문 교환 포함)가 많은 영향을 끼친 것으로 보인다. 11명의 대상 인물은 전반적으로 같은 당파인 남인계열(이학규, 권영좌), 김정희와 신위의 교유그룹을 중심으로 하는 시인들(유최관, 김정희, 윤정현, 박장암, 한만식, 신위, 이조헌, 남성집), 마지막으로 마재(소내) 인근 지역에서 이웃으로 교제한 이노영의 경우로 나눌 수 있다. 정학연은 여러 편의 회인시를 남겼는데, 『추일회인절구십일수』에 이어 창작된 『歲暮江鄕, 門無來客, 只有梅花在紙屛中, 燈火靑熒, 澹然相對, 如將晤語, 感年華之迅速, 思往事之悠邈, 遂以梅花起興, 寓念舊懷人之意, 援筆疾書, 呈海居』(『酉山詩』, 필사본 1책, 실학박물관 소장)는 회인시로서는 독특한 면모를 지닌 변격의 회인시라고 할 수있다. 여기에 나오는 11명의 인물들은 장년기 교유의 연장선상에 있다. 그리고 아직 발굴되지 않은 『회인시』 40장(1840년작)은 만년기 교유의 핵심을 보여주는 작품이었을 것으로 추정된다. This paper will introduce Chuilhuiyinjeolgu 11 verses(「秋日懷人絶句十一首」). This is a kind of hui-yin(the theme is gathered people) poetry(懷人詩) created by ‘Jeong Hak-yeon(1783~1859) who is the son of Dasan Jeong Yak-yong (1762~1836). These verses are the earliest work of the poet’s collection of poems(1826~27). In the poems, there appear 11 different people and Jeong Hak-yeon created this under the influence of his friends, Shin Yui(申緯) and Lee Hak-gyu(李學逵). Of eleven people, some belong to Nam-yin(Lee Hak-gyu and Gwon young-jwa), and some related to the networks of Shin Yui and Kim Jeong-hee(Yoo Chui-gwan, Kim Jeong-hee, Yoon Jeong-hyun, Bak Jang-am, Han Man-sik, Shin Yui, Lee Jo-heon, Nam Seong-jib), and the last one, Lee Roh-young, is the poet’s neighbor. Jeong Hak-yeon leaves several hui-yin poems, and these show special trait-irregularity. The eleven people are in the extension of their relationship of adulthood. Lastly, we presume that the poet’s other hui-yin poems-still not excavated-could show the poet’s latter years.

민성휘(閔聖徽) 가문의 장서 연구 -7대손 민경속(閔景涑)과 유만주(兪晩柱)의 서적 왕래를 겸하여-

김영진 ( Kim Young-jin ),안정은 ( Ahn Jeong-eun ) 한국한문학회 2020 韓國漢文學硏究 Vol.0 No.80

본고는 조선시대 서책문화, 그 가운데 ‘私家藏書’에 대한 사례 연구를 여흥민씨 閔聖徽(1582~1648) 가문을 대상으로 한 것이다. 연구의 주안점은 두 가지인데 첫째는 민성휘 개인이 본격적으로 형성한 ‘사가장서’의 실체와 특징이고, 둘째는 민성휘의 7대손 閔景涑(1751~1794)의 장서다. 후자의 경우엔 벗 兪晩柱(1755~1788)와의 사이에 이루어진 書冊 相互 借覽과 문학, 학술 담론을 중심에 두었다. 민성휘의 1628년 明 使行에서의 서책 구입과 민경속과 유만주의 교유는 기존 연구성과가 있다. 본고는 기존 성과 위에 민성휘 윗대 아랫대의 저술 및 장서 현황, 소론 당파보인 『簪譜』 및 민경속의 인척 鄭堉이 편찬한 印譜 『圖書譜』, 任天常의 『試筆』 등의 신자료를 추가하여 이 가문의 장서 형성 과정과 그 학술 문화사적 특성을 보다 구체화하였다. 우선 민성휘의 『肅敏書目』을 재검토하고 현존하는 민성휘 장서인이 압인된 책들을 조사하여 관련 방증을 하였다. 또한 민성휘가 수집한 장서와 서책에 대한 관심이 가까이는 민성휘의 『松京訪碑錄』, 閔晉亮의 『唐詩類選』, 閔周冕의 『(新纂)東京誌』로 이어졌고, 멀리는 7세손 민경속의 『知先錄』과 『迂叟謾錄』 및 『輸廫故人錄』, 8세손 閔魯行의 『名數咫聞』과 『咫聞別集』 등으로 이어졌음을 논하였다. 민경속과 유만주 사이에 1785년부터 1787년까지 3년간 지속된 서책 교류를 총정리하였다. 이 둘의 진지하고 진솔한 학술교류는 방문 외에 양가 장서 및 서화의 상호 대차와 감상을 기본으로 하였는 바 두 가문의 당파와 교유권의 차이로 인해 수장 자료의 성격차이 역시 컸다. 이 점이 상대방의 호기심을 일으키고, 부족한 면을 충족시켜 주면서 서로의 성장에 밑거름이 되었다. 민경속의 인척으로 특히 주목되는 것이 ‘江華學’으로 널리 알려진 전주이씨 덕천군파와 연일정씨 鄭夏彦 후손가다. 연일정씨는 또 자하 신위와 연결되어 이후 민노행이 추사 김정희와 교류를 갖게되는 계기가 되었다. 민성휘가의 『서책목록』이 발견되지 않았고, 이 가문의 장서도 다 흩어졌다는 제약과 한계 속에서도 여러 자료의 편린들을 찾아내어 민씨가의 학술문화사적 의의를 추출하여 보았다. 이 과정에서 兪晩柱의 『欽英』이 갖는 서적문화사에서의 높은 의의를 재삼 확인할 수 있었다. 여흥민씨가의 장서와 그것의 학술문화사적 효용은 ‘조선시대 사가장서’의 한 실상과 의미 부여를 하였다는 데에 의의가 있다 하겠다. This thesis focused on the book culture in the Choseon Dinasty period, particularly with the emphasis laid on the family of the Yeoheung Mins by way of the case study on the collection of books at the private family of Seong-Hui Min(1582~1648) of the Yeoheung Mins. The main emphasis is two and the first is the substance and characteristics of ‘the collection of books at private family’ purposefully formulated by the individual Seong-Hui Min and the other is the collection of books of the 7^th descendant Gyeong-Sok Min(1751~1794). In the latter case, the focus was laid on the mutual borrowing and reading of the books and academic discourse with his friend Man-Ju Yoo(1755~1788). The purchase of books by Seong- Hui Min in his envoy trip to Ming in 1627 and the exchange between Gyeong-Sok Min and Man-Ju Yoo were greatly facilitated by Ha-Ra Kim. On top of the achievements of Ha-Ra Kim, this thesis carried out a more realistic review of the background of the formulation of the collection of books at this family and the academic and cultural historical characteristics with reference to the significant new data such as the writings and the status of book collections, the newsletter of Soron Party 『Jambo』, the book of impressions of seals 『Doseobo』 published by Yook Jeong who was a member of Yeonil Jeongs which was a relative family of Gyeong-Sok Min and others. First, this thesis aimed to establish the circumstantial evidence by conducting a review of 『Sukminseomok』 written by Seong-Hui Min and investigating the books belonging to the extant collection of books of Seong-Hui Min. It was verified that most of the pressing books from the extant collection of Seong-Hui Min are wood-block print books from Ming and discussed that the books were scattered from early stages. In addition, it was discussed that the attention to the collections and books established by Seong-Hui Min extended closely to 『Songgyeongbangbirok』 by Seong- Hui Min, 『Dangsiyuseon』 by Jin-Yang Min and 『(New Publication) Donggyeongji』 and remotely to 『Jiseonrok』, 『Osumyeonrok』 and 『Suyogoinrok』 by the 7^th descendant Grong-Sok Min and 『Myeongsuchimun』 and 『Jimoonbyeoljib』 by the 8th descendant No-Haeng Min. The thesis made an aggregate summary of the exchange of books between Gyeong-Sok Min and Man-Ju Yoo which lasted for 3 years from 1785 to 1787. The earnest and sincere academic exchange between them revealed the differences in the books and paintings stored due to the differences in faction, relatives and others apart from the collection of books in each family and these differences made great contribution to their mutual growth by invoking the intellectual curiosity and supplementing the deficient parts of each. The books of Gyeong-Sok Min can be divided between those inherited and those collected by oneself and in regard of the latter it was confirmed that the relative share of the books from Choseon Dynasty was much increased and that the relative families the Jeonju Lees (Deokcheongun family branch - Ganghwahak) and the Yeonil Jeongs inflicted a great influence on the procurement of books. By way of the connection with Jaha Wui Shin, the Yeonil Jeongs offered the opportunity for No-Haeng Min to have exchanges with Chusa Jeong-Hee Kim. Even under the limitation and restriction that 『List of Books』 of the family of Seong-Hui Min was not discovered and the collection of books of the family was all scattered around, the academic and cultural historical implications of the books of the Mins was extracted by discovering the partial fractions of a diversity of data. In this process, the high cultural historical value of the literatures retained by 『Heumyeong』 by Man-Ju Yoo could be ascertained anew. This thesis has the meaning that it highlighted the fact that the collection of books at the Yeoheung Mins and their academic and cultural historical utility reveal a realistic aspect of the ‘collection of books at private families in Choseon Dynasty Period’ and also that it gave such a meaning.

곡아지실소시호탕(穀芽枳實小柴胡湯)의 간보호작용(肝保護作用)에 관(關)한 실험적(實驗的) 연구(硏究)

김영진,강대근,이재익,김강산,강병기,전영세,Kim, Young-Jin,Kang, Dae-Geun,Lee, Jae-Ik,Kim, Kang-San,Kang, Byung-Ki,Cheon, Young-Sae 대한한방내과학회 2000 大韓韓方內科學會誌 Vol.21 No.2

This study was performed to elucidate the effects of Gokajisilsosiho-Tang(GJST) on the lactic dehydrogenase(LDH) release, cell viability and activity, lipid peroxidation, DNA synthesis and the changes of total protein synthesis and GSH changes in vivo and in vitro in rat cultured hepatocytes from hydrogen peroxide$(H_2O_2)$-induced injury. The GJST extract had not an effect on cytotoxicity in all experimental results. The treatment of GJST extract of $160{\mu}g/ml$, $320{\mu}g/ml$ showed the significant effect to decrease LDH leakage induced by t-BHP in cultured rat hepatocytes. The higher concentration of GJST extract than $160{\mu}g/ml$, showed the inhibitory effect on decreasing cell viability induced by t-BHP. The treatment of t-BHP to rat cultured hepatocytes resulted in a concentration dependent increase in TBARS, in the presence of GJST extract the production of TBARS induced by hydrogen peroxide was inhibited concentration dependently, significantly inhibited at $80{\mu}g/ml$ of GJST extract and above. The GJST extract simutaneously present with t-BHP prevented the loss of total protein and GSH in a concentration dependent manner. These results suggested that GJST extract may play a hepatoprotective role in oxidative damage induced by hydrogen peroxide and a therapeutic potential of inhibiting liver injury.

세척과 안정화기술을 적용한 오염 준설토의 처리 및 재활용 시스템 개발

김영진,남경필,이승배,김병규,권영호,황인성,Kim, Young-Jin,Nam, Kyoung-Phile,Lee, Seung-Bae,Kim, Byeong-Kyu,Kwon, Young-Ho,Hwang, In-Seong 한국지하수토양환경학회 2010 지하수토양환경 Vol.15 No.2

Although the demands for the dredging work have been increasing due to social and industrial reasons including national plan for restoration of four major rivers, environmental standards or management guidelines for the dredged river sediment are limited. The suggested environmental standard for the beneficial use of dredged river sediment consists of two levels, recyclable and concern, and includes eight contaminants such as metals and organic contaminants. The systematic approach to remediate dredged river sediment is also suggested. The system consists of both washing and stabilization processes with continuous multi particle separation. In the early stage, the sediments are separated into two particle sizes. The coarse-grained sediment over 0.075 mm, generally decontaminated with less trouble, follows normal washing steps and is sent for recycling. The fine-grained sediments under 0.075 mm are separated again at 0.025 mm. The particles bigger than this second separation point are treated in two ways, advanced washing for highly contaminated sediments and stabilization for less. The lab test results show that birnessite and apatite are most effective stabilizing agents among tested for Cd and Pb. The most fine residues, down-sized by continuous particle separation, are finally sent for disposal. The system is tested for metals in this study, but is expected to be effective for organic contaminants included in the environmental standard, such as PAH and PCE. The feasibility test on the field site will be followed.

컴퓨터를 이용한 속도 조절형 치과 국소마취 기구: 문헌고찰

김영진,이준형,이강희,김기덕,정복영,방난심,박원서,Kim, Young-Jin,Lee, Jun-Hyung,Lee, Kang-Hee,Kim, Kee-Deog,Jung, Bock-Young,Pang, Nan-Sim,Park, Wonse 대한치과마취과학회 2013 Journal of Dental Anesthesia and Pain Medicine Vol.13 No.4

Background: Today, there are computer controlled local anesthesia devices used clinically. The main principle is to control injection speed by computer aided system, and it relieves pain. However, there are few objective data considering this subject. In this literature review, we researched studies about computer controlled anesthetic delivery. We compared pain control effect of computer controlled to conventional local anesthetic syringe system. Methods: A bibliographic search in PubMed was performed and we reviewed original articles. Results: There were 18 publications that compared pain control effect of computer controlled to conventional system. There were 8 articles reported of children, similar pain control effect was found in 7 of them. One study showed superior pain control effect of computer controlled anesthetic delivery. For adults, 10 studies showed superior pain control effect in computer aided system. Conclusions: Computer controlled anesthetic delivery has similar or superior pain control effect compared to conventional local anesthetic syringe system. For both children and adults, computer controlled anesthetic delivery could be clinically useful, still it may be more effective for adults.

자발성 흉추부 척수 탈출증 - 증례보고 -

김영진,김영수,김주헌,이형중,고용,오성훈,김광명,오석전,Kim, Young Jin,Kim, Young Soo,Kim, Ju Hun,Yi, Hyeong Joong,Ko, Yong,Oh, Sung Hun,Kim, Kwang Myung,Oh, Suck Jun 대한신경외과학회 2001 Journal of Korean neurosurgical society Vol.30 No.10

Spontaneous herniation of the spinal cord is a very rare. It's clinical symptom presents with progressive myelopathy. A 42-year old male patient who presented the progressive left leg weakness and Brown-Seqaurd syndrome is presented. MRI showed a typical finding of dural defect and herniation of the cord on the level of T3-4. Repair of dural defect using an artificial dura and reposition of cord herniation were undertaken after three level laminectomies with SSEP monitoring. Postoperatively, symptoms were improved rapidly. In our knowledgement, this is first case being reported in Korea. This entity, although rare, should be considered in the differential diagnosis of myelopathy in the absence of a mass lesion.

산화막 CMP에서 발생하는 온도가 연마특성에 미치는 영향

김영진,박범영,김형재,정해도,Kim, Young-Jin,Park, Boum-Young,Kim, Hyoung-Jae,Jeong, Hae-Do 한국전기전자재료학회 2008 전기전자재료학회논문지 Vol.21 No.2

We investigated the effect of process temperature on removal rate and non-uniformity based on single head kinematics in oxide CMP. Generally, it has been known that the temperature profile directly transfers to the non~uniformity of removal rate on the wafer, which has similar tendency with the sliding distance of wafer. Experimental results show that platen velocity is a dominant factor in removal rate as well as average temperature. However, the non-uniformity does not coincide between process temperature and removal rate, due to slurry accumulation and low deviation of temperature. Resultantly, the removal rate is strongly dependent on the rotational speed of platen, and its non -uniformity is controlled by the rotational speed of polishing head. It means lower WIWNU (With-in-wafer-non-uniformity) can be achieved in the region of higher head speed.

의료과오소송의 법리와 최근 판례의 동향 1

김영진,김진,kim Young-Jin,kim Jin 대한치과의사협회 2001 대한치과의사협회지 Vol.39 No.3