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에어백용 압저항형 외팔보 미소 가속도계의 설계, 제작 및 시험
고종수,조영호,곽병만,박관흠,Ko, Jong-Soo,Cho, Young-Ho,Kwak, Byung-Man,Park, Kwan-Hum 대한기계학회 1996 大韓機械學會論文集A Vol.20 No.2
A self-diagnostic, air-damped, piezoresitive, cantilever-beam microaccelerometer has been designed, fabricated and tested for applications to automotive electronic airbag systems. A skew-symmetric proof-mass has been designed for self-diagnostic capability and zero transverse sensitivity. Two kinds of multi-step anisotropic etching processes are developed for beam thickness control and fillet-rounding formation, UV-curing paste has been used for sillicon-to-glass bounding. The resonant frequency of 2.07kHz has been measured from the fabricated devices. The sensitivity of 195 $\mu{V}$/g is obtained with a nonlinearity of 4% over $\pm$50g ranges. Flat amplitude response and frequency-proportional phase response have been obserbed, It is shown that the design and fabricaiton methods developed in the present study yield a simple, practical and effective mean for improving the performance, reliability as well as the reproducibility of the accelerometers.
PZT 순수박막과 PZT/PT 교차박막의 적외선 감지 특성 비교
고종수,곽병만,Ko, Jong-Soo,Kwak, Byung-Man 대한기계학회 2002 大韓機械學會論文集A Vol.26 No.6
To improve the performance of the PZT thin flms, each PZT and PT layer was alternately deposited on a Pt/Ti/Si$_3$N$_4$/SiO$_2$/Si substrate by a modified sol-gel solid precursor technique. For comparison, PZT thin films were also prepared with an identical method under the same conditions. XRD measurement revealed that the diffraction pattern of the multilayer film was due to the superimposition of the PZT and PT patterns. At 1㎑, a dielectric constant of 389 and 558, a dielectric loss of 1.2% and 1.1% were obtained for the PZT/PT and PZT thin films, respectively. If we consider the PT dielectric constant to be 260, it is clear that the dielectric constant of alternately deposited PZT/PT thin films was well adjusted. The PZT/PT thin film showed a low dielectric constant and a similar dielectric loss compared with those of the PZT film. The figures of merit on detectivity for the PZT/PT and PZT thin films were 20.3$\times$10$\^$-6/㎩$\^$-$\sfrac{1}{2}$/, and 18.7$\times$10$\^$-6/㎩$\^$-$\sfrac{1}{2}$/, and the figures of merit on voltage response were 0.038㎡/C and 0.028 ㎡/C, respectively. The high figures of merit for the PZT/PT film were ascribed to its relatively low dielectric constant when compared to the PZT thin films.
고종수(Jong Soo Ko),김규현(Kyu Hyun Kim),이창열(Chang Yeol Lee),조영호(Young-Ho Cho),이귀로(Kwyro Lee),곽병만(Byung Man Kwak),박관흠(Kwanhum Park) 한국자동차공학회 1995 한국자동차공학회 춘 추계 학술대회 논문집 Vol.1995 No.6_2
A silicon microaccelerometer is designed and fabricated using silicon epitaxial layers for automotive electronic airbag applications. A cantilever structure is chosen for high sensitivity and a piezoresistive detection method is adopted for circuit simplicity and low cost. An optimum design is used to find optimum microstructure sizes for maximum sensitivity subject to performance requirements and design constraints on natural frequency, damping ratio, maximum allowable stress and microfabrication limitations. The microaccelerometer is fabricated by micromachining processing steps, composed of material-selective and orientation-dependent chemical etching techniques. Fabricated prototype shows a sensitivity of 88.6μV/g within a resonant frequency of 1.75kHz. Estimated performance of the microaccelerometer is compared with measured one. Discrepancy between the theoretical values and the experimental values is discussed together with possible sources of the errors.<br/>
고종수(Jong Soo Ko),이대식(Dae-Sik Lee),이명래(Myung Lae Lee),최창억(Chang Auk Choi),김윤태(Youn Tae Kim) 대한기계학회 2002 대한기계학회 춘추학술대회 Vol.2002 No.5
A laterally driven electromagnetic microactuator (LaDEM) is introduced, and a micro-optical switch is<br/> designed and fabricated as an application. LaDEM offers parallel movement of the microactuator to the<br/> silicon substrate surface (in-plane mode). Poly-silicon-on-insulator (poly-SOI) wafers and a reactive ion<br/> etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the<br/> equipping of vertical micro-mirrors. A fabricated single leaf spring had a width of 1.2 mm, thickness of 16 mm,<br/> and length of 800 mm. The resistance of the fabricated leaf spring for the optical switch was 5 W. The<br/> deflection of the leaf spring started to profoundly increase at about 400 mA, and it showed snap-through<br/> phenomenon over that current value. Owing to the snap-though phenomenon, a large deflection of 60 mm was<br/> detected at 566 mA.
고충격 미소가속도계의 압저항-구조 연성해석 및 최적설계
한정삼,권순재,고종수,한기호,박효환,이장우,Han, Jeong-Sam,Kwon, Soon-Jae,Ko, Jong-Soo,Han, Ki-Ho,Park, Hyo-Hwan,Lee, Jang-Woo 한국군사과학기술학회 2011 한국군사과학기술학회지 Vol.14 No.1
A micromachined silicon accelerometer capable of surviving and detecting very high accelerations(up to 200,000 times the gravitational acceleration) is necessary for a high impact accelerometer for earth-penetration weapons applications. We adopted as a reference model a piezoresistive type silicon micromachined high-shock accelerometer with a bonded hinge structure and performed structural analyses such as stress, modal, and transient dynamic responses and sensor sensitivity simulation for the selected device using piezoresistive-structural coupled-field analysis. In addition, structural optimization was introduced to improve the performances of the accelerometer against the initial design of the reference model. The design objective here was to maximize the sensor sensitivity subject to a set of design constraints on the impact endurance of the structure, dynamic characteristics, the fundamental frequency and the transverse sensitivities by changing the dimensions of the width, sensing beams, and hinges which have significant effects on the performances. Through the optimization, we could increase the sensor sensitivity by more than 70% from the initial value of $0.267{\mu}V/G$ satisfying all the imposed design constraints. The suggested simulation and optimization have been proved very successful to design high impact microaccelerometers and therefore can be easily applied to develop and improve other piezoresistive type sensors and actuators.