Characteristics of a plasma information variable in phenomenology-based, statistically-tuned virtual metrology to predict silicon dioxide etching depth

Jang, Yunchang,Roh, Hyun-Joon,Park, Seolhye,Jeong, Sangmin,Ryu, Sanywon,Kwon, Ji-Won,Kim, Nam-Kyun,Kim, Gon-Ho Elsevier 2019 CURRENT APPLIED PHYSICS Vol.19 No.10

<P><B>Abstract</B></P> <P>A phenomenology-based virtual metrology (VM) for monitoring SiO<SUB>2</SUB> etching depth was proposed by Park (2015). It achieved high prediction accuracy by introducing newly developed plasma information (PI) variables as designated inputs, called PI-VM. The PI variables represent the state of the plasma, the sheath, and the target during the process. We investigate how a PI variable can help to improve prediction accuracy of VM and how it plays a special role in the statistical selection. We choose only PI<SUB>EEDF</SUB> among the three PI variables to focus on the investigation. The PI<SUB>EEDF</SUB> is determined from the ratio of line-intensities of optical emission spectroscopy. We apply Pearson's correlation filter (PCF), principal component analysis (PCA), and stepwise variable selection (SVS) as statistical selection methods on the variables set including PI<SUB>EEDF</SUB> or not. Multilinear regression is used to model the VM. This study reveals that PI<SUB>EEDF</SUB> variable is a good variable in terms of independence from other input variables and explanatory power for an output variable. Especially, VM using SVS method applied to variable sets including PI<SUB>EEDF</SUB> achieves the highest accuracy, comparable to Park's PI-VM. This study shows that PI<SUB>EEDF</SUB> variable is particularly useful for monitoring of the fine variations in semiconductor manufacturing process and it also extends the utilization of OES sensor data.</P>

광교산 등산시설의 만족도에 관한 연구

박진기(Park Jang Geun),이원회(Lee Won Hee) 한국사회체육학회 2000 한국사회체육학회지 Vol.14 No.-

The purpose of this study was to offer the fundamental data on the satisfaction level of facilities, which focused on analyzing the number of facilities, the location of facilities, facility management and public relationship for the climbers of the Kangkyo Mountain. This study examined the social and economic characteristics'. gender, age, occupation, educational background, personal income, and the climbers characteristics ' the types of climbers, climbing career, a day of the week for climbing and time spent in the park. For the purpose of this study, a developed questionnaire was used and samples included 206 climbers who lived in Suwon. (1) The satisfaction level about the number of facility showed the difference among the group classified by occupation, educational background. The highest level was women by gender, 30-39 by age, high school graduated people by educational background, functional part by occupation, 2,000,000-2,990,000 won by personal income. (2) The satisfaction level about the location of facility showed the difference among the group classified by occupation and educational background. The highest level was women by gender, over 40-49 by age, high school graduated people by educational background, house wife by occupation, 2,000,000-2,990,000 won by personal income. (3) The satisfaction level about the facility management showed the difference among the group classified by gender, occupation, personal income, and educational background. The highest level was a woman by gender, over 50 by age, high school graduated people by educational background, house wife by occupation, 2,000,000-2,990,000 won by personal income. (4) The satisfaction level about public relationship showed the difference among the group classified by age. The highest level was women by gender, 40-49 by age, the rest group by educational background, management part by occupation, over 3,000,000 won by personal income. On the base of the above results, organized public relationship program and effectual facility management system are needed Fundamental data for improving plans must be studied by the different point of view from national parks.

콜롬비아 소가모스에서 미세먼지 감축 시나리오 분석

박일수(Park, Il-Soo),장유운(Jang, Yu-Woon),하상섭(Ha, Sang-Sub),장수환(Jang, Su-Hwan),정경원(Chung, Kyung-Won),김혜원(Kim, Hye-Won),김희선(Kim, Hee-Sun) 한국외국어대학교 중남미연구소 2016 중남미연구 Vol.35 No.2

콜롬비아 소가모스 지역에서 미세먼지 감축 시나리오를 TAPM 모델을 활용하여 도출하고 평가하였다. 시나리오 1의 제철소 및 금속 등 중공업 오염원을 대상으로 미세먼지 방지 기술을 이용하여 배출량을 80% 감축하는 방안에서는 도시 중심 평균 농도는 6.5 μg m-3로 1.5 % 감소하였고, 모델영역에서 최고 평균농도는 387 μg m-3 로 변동 없었다. 시나리오 2의 벽돌 및 석회공장 등을 대상으로 연료를 석탄에서 코크스로 교체하여 90 % 감축하는 방안에서는 도시 중심 평균 농도는 4.5 μg m-3로 31.8%, 모델영역에서 최고 평균농도는 111 μg m-3 로 71.6 % 감소하였다. 시나리오 1과 시나리오 2를 결합한 시나리오 3에서는 도시 중심에서 평균 농도는 4.3 μg m-3로 34.8 %, 모델영역에서 최고 평균농도는 110 μg m-3 로 71.7 % 감소하였다. 소가모스 지역에서 대기환경을 개선하는 로드맵 수립에는 수공업에서 주로 사용되는 석탄 연료를 청정연료인 코크스로 교체하는 방안이 최우선으로 고려되어야 하겠다. 이후 미세먼지 방지 시설을 굴뚝에 설치하는 방안도 차선책으로 고려하여 환경과 경제가 선 순환하는 녹색성장관점에서 장기적인 미세먼지 개선 마스터 플랜이 수립되어야 하겠다. Reduction scenarios for PM10 concentration in Sogamoso, Colombia were analyzed using the TAPM( The Air Pollution Model). The average concentration of PM10 in the downtown area was 6.5 μg m-3, a reduction of 1.5 %. The maximum average concentration in the model domain was 387 μg m-3 without any reduction in scenarios 1 which the PM10 emissions from heavy industries such as iron and metal was reduced by 80 % using the prevention technology. In scenario 2 which the PM10 emissions from the brick and lime industries was reduced by 90 % substituting coke (a cleaner fuel) for coal, the average concentration of PM10 in the downtown area was 4.5 μg m-3, a reduction of 31.8 % , the maximum average concentration in the model domain was 111 μg m-3 , a reduction of 71.6 %. In scenario 3 which the scenarios 1 and 2 were combined, the average concentration of PM10 in the downtown area was 4.3 μg m-3, a reduction of 34.8 % and the maximum average concentration was 110 μg m-3, a reduction of 71.7 %. To put forward a road map for the reduction of PM10 in the Sogamos region, substituting coke for coal in manual industries should have priority over reduction policies. Also, it is highly recommended that a longterm master plan for reducing PM10 concentrations should be established with a focus on environmentally-friendly development and future green growth policy with a win-win relationship between economy and environment.

지상라이다를 이용한 미기록 외래종 갯쥐꼬리풀(Spartina Alterniflora)의 분포특성과 관리방안 연구 -다도해 해상국립공원 진도 남동리 해안을 사례로-

박정원 ( Jung Won Park ),김하송 ( Ha Song Kim ),장성건 ( Seong Geon Jang ),천숙진 ( Sook Jin Chun ),육관수 ( Kwan Soo Yuk ) 한국도서학회 2015 韓國島嶼硏究 Vol.27 No.3

갯쥐꼬리풀(Spartina alterniflora)은 북미 대서양 연안 뉴펀들랜드, 캐나다 남쪽에서 아르헨티나 북부의 갯벌이 원산이며, 생장이 강한 특성으로 세계의 기수지역과 해안에서 생태공학적 용도로 도입된 바 있다. 그러나 매우 빠르게 갯벌을 피복하여 자생종의 생장을 방해하고, 염습지 종다양성을 감소 시켰고, 결과적으로 과다생육으로 갯벌 무척추동물의 서식지를 잠식해 사라지게 하여 무척추동물을 먹이로 하는 조류 또한 생태계 내에서 감소키는 등 많은 환경문제를 야기 시켰다. 우리나라에서는 2008년 전후에 다도해해상국립공원에 유입된 것으로 판단된다. 현재 다도해해상국립공원 남동리 해안에서 분포하고 있는 갯쥐꼬리풀(Spartina alterniflora)군락은 습지내 총 6개의 염생식물 군락면적(8,487.7㎡) 중 75.34%의 비율(6,394.86㎡)로 분포하고 있다. 또한 2008년에 11.54㎡ 이던 분포 면적이 2015년 현재 약 550배가 늘어난 6,394.22㎡로 조사되었고 생육지 고도 범위인 0.69m~1.1m를 요인 값으로 두고 GIS 분석한 하였다. 그 결과 앞으로 확산 될 예상 면적은 12,584㎡이며 현재보다 약 6,189.14㎡가 늘어날 것으로 예측되며 우리나라에서도 역시 확산이 빠르고 넓게 늘어날 것으로 판단된다. 향후 계속 분포역이 확대 될 것으로 예상하고 관리방안을 위하여 시범 연구를 실시하였다. 갯쥐꼬리풀군락 중 일부를 첫 번째는 뿌리째 뽑아내기와 두 번째 지상부 제거 후 포장덮기 방법 등 국외사례의 문헌을 바탕으로 방재를 실시하였으나 전체 면적을 방재하기에는 많은 인력과 시간 그리고 예산이 소요되므로 다각적인 방안을 강구하여야 한다. Spartina alterniflora is native to the Atlantic coast from Newfoundland, the south of Canada and northern Argentina. There it forms a dominant part of brackish coastal saltmarshes. Due to its strong growth, the Spartina alternifolra was introduced to the rider area and coast as a use for ecological engineering. The Spartina alterniflora community can crowd out native species, reduce the biodiversity of saltmarsh and alter the environment. As a result, the invertebrates living in mud flats disappeared due to the encroaching of Spartina alterniflora, and the birds which eat off invertebrates went along as well. The Spartina alterniflora was first introduced in South Korea in 2008 and is known to have flowed in the Dadohaehaesang National Park. Compared to 2008, in 2015 the distribution area of the Spartina alterniflora has increased 550 times. (11.54㎡ in 2008 to 6,394.22㎡ in 2015). The large increase of Spartina alterniflora calls for urgent management and additionary study on the subject. Thus, this study analyzed the geo-spatial information on the Spartina alterniflora such as its distribution area, the height of habitats and expected expansion area, and can act as the preliminary data for management.

필리핀 여행 후 발생한 쯔쯔가무시병 1예

김계형,김낙현,김문석,김충종,전재현,박완범,장원종,박상원,김익상,오명돈,최강원 대한감염학회 2008 감염과 화학요법 Vol.40 No.6

Infectious diseases imported from other countries have increased as more and more Koreans are going abroad for various purposes. Tsutsugamushi disease from other endemic area such as Southeast Asia is important, because it can occur in any season and eschar may be absent. We report a case of imported tsutsugamushi disease acquired in the Philippines. A patient presented with fever, headache, and maculopapular skin rash. However, eschar was absent. Polymerase chain reaction (PCR) for 56-kDa gene of Orientia tsutsugamushi using buffy coat was positive. Serum indirect immunofluorescent antibody assay was initially negative but became positive with a titer of 1:320 at follow-up, Sequencing analysis revealed the strain to be 100% identical to the TW73R strain identified in Taiwan. After the patient received doxycycline, body temperature normalized in 12 hours. Tsutsugamushi disease is one of the differential diagnoses that should be included for patients with fever who have recently returned from Southeast Asian countries. PCR for O. tsutsugamushi using patient's buffy coat was useful for early diagnosis.

우리나라 노인여성의 골다공증성 척추골절로 인한 경제적 부담 추계

강혜영,강대룡,장영화,박성은,최원정,문성환,양규현,Kang, Hye-Young,Kang, Dae-Ryong,Jang, Young-Hwa,Park, Sung-Eun,Choi, Won-Jung,Moon, Seong-Hwan,Yang, Kyu-Hyun 대한예방의학회 2008 예방의학회지 Vol.41 No.5

Objectives : To estimate the economic burden of osteoporotic vertebral fracture (VF) from a societal perspective. Methods : From 2002 to 2004, we identified all National Health Insurance claims records for women ${\geq}50$ years old with a diagnosis of VF. The first 6-months was defined as a "clearance period," such that patients were considered as incident cases if their first claim of fracture was recorded after June 30, 2002. We only included patients with ${\geq}$ one claim of a diagnosis of, or prescription for, osteoporosis over 3 years. For each patient, we cumulated the claims amount for the first visit and for the follow-up treatments for 1 year. The hospital charge data from 4 hospitals were investigated to measure the proportion of the non-covered services. Face-to-face interviews were conducted with 106 patients from the 4 study sites to measure the out-of-pocket spending outside of hospitals. Results : During 2.5 years, 131,453 VF patients were identified. The patients had an average of 3.38 visits, 0.40 admissions and 6.36 inpatient days. The per capita cost was 1,909,690 Won: 71.5% for direct medical costs, 20.6% for direct non-medical costs and 7.9% for indirect costs. The per capita cost increased with increasing age: 1,848,078 Won for those aged 50-64, 2,084,846 Won for 65-74, 2,129,530 Won for 75-84and 2,121,492 Won for those above 84. Conclusions : Exploring the economic burden of osteoporotic VF is expected to motivate to adopt effective treatment options for osteoporosis in order to prevent the incidence of fracture and the consequent costs.

화학 이론의 전통 과학적 연구

박서영,정원우,방경곤,김용수,문장수,이우붕 慶北大學校 師範大學 科學敎育硏究所 2007 科學敎育硏究誌 Vol.31 No.-

According to the system of the oriental traditional science, everything has to be harmony and interact with one another. The fundamental notions of the traditional natural philosophy are "do(doctrine)", "taegeuk(the great absolute)", "yin-yang," "five primary substance", "four events", and "eight signs for divination". Taegeuk, especially, explains the formation and the death of all things in the universe through circulation of yin-yang, and shows the balance of nature and universe. Yin-yang, relative ideas produces four events, and four events also is divided into the eight signs for divination. 'four events', 'eight signs for divination' like 'yin-yang' indicates the cycle of nature. The essential notions of the traditional science are not different from those of modern chemistry. Taegeuk which is the origin of all things in the universe means the situation of harmony and balance through ceaseless circulation and connotes dynamic equilibrium on neutralization that chemical reaction get to. A number of opponent concepts such as acid-base, oxidation-reduction, atomic nucleus-electron are given an explanation by ying-yang(the positive and negative) that reaches Taegeuk through chemical bonding or reaction over simple antagonistic relationship. 'Yin-yang', 'four-events', 'eight signs for divination' do not imply a substance or a phenomenon in itself but the properties of them. That is why it is possible to see into various chemical concepts like a relative strength of acid-base, groups of periodic table with traditional scientific philosophy. We have regretfully neglected studies in traditional science. It is time to perform the concrete work connecting theory of traditional science with that of modern science for advisable appreciating of traditional science. Moreover, It is necessary to do research and development of educational programs or teaching-learning materials using the traditional science properly. 동양 과학 철학이나 자연 철학은 태극,음양오행,사상팔괘를 이용해 우주 만물의 운동과 자연의 순환을 설명하는데 있어 그 학문적 우수성을 부인할 수 없으나 현대의 화학식이나 수식이 현상을 미시적 관점에서 구체적으로 설명할 수 있는 것과는 달리 전통 과학이론은 거시적 관점에서 그 전체적 흐름만을 나타낸다는 한계를 가지고 있다. 그럼에도 불구하고 태극,음양오행 그리고 사상팔괘론을 중심으로 한 전통 과학 이론은 현대인들에게 과학에 대한 새로운 시각을 제공함으로써 무분별하고 비윤리적인 과학 기술 활용으로 인한 전 지구적인 문제들을 해결하는데 있어 핵심적인 역할을 수행함은 물론 오늘날의 한국 과학이 한 걸음더 전진하는데 이바지 할 수 있을 것이다. 그러므로 서구 중심의 기존의 과학문명에만 머무를 것이 아니라 동양의 전통 과학 철학을 연구하여 민족의 과학 체계를 수립하고 과학의 토착화를 이루어야 한다. 이를 성공적으로 수행하기 위해서는 전통 과학과 현대 과학 사이에 다리를 놓는 구체적인 작업이 본격적으로 진행되어야 한다. 기본적인 화학 개념들을 전통 과학적 관점에서 재해석 하는 것은 물론이고 더 나아가 전통 과학의 이론을 이용하여 화학 반응 과정을 구체적으로 설명하려는 시도가 필요할 것이다.

다제내성 그람양성균에 대한 Linezolid(Zyvox^(�))의 시험관내 항균력 비교

박대원,정희진,엄중식,황병연,김성범,이재갑,이연주,정혜원,정성주,박재형,이진수,손장욱,김우주,김민자,박승철 대한감염학회 2003 감염과 화학요법 Vol.35 No.5

배경 : MRSA, VRE, VRSA같은 다제 내성 그람 양성균의 등장에 따라 glycopeptide를 대체할 새로운 항생제의 개발이 필요하게 되었고 결과적으로 새로운 항생제인 linezolid라는 항생제가 개발되었다. Linezolid는 이전의 항생제와는 다른 새로운 계열의 oxazolidinone으로 경구 이용률이 우수하다. 원내 및 원외감염의 중요한 원인균이 되고 있는 MRSA, VRE에 대한 적절한 경구용 항균제가 없는 국내에서 폐렴 및 피부 연조직 감염에서 경구용으로 사용해 볼 수 있는 약제이다. 본 연구에서는 고대 구로 병원에서 분리된 MRSA, VRE 등을 대상으로 다른 여러 항균제와 비교한 linezolid의 시험관내 항균력을 조사하고자 하였다. 재료 및 방법 : 연구대상은 1998년 1월부터 2000년 12월까지 본원에서 입원 및 외래를 통하여 피부 연조직 감염증 및 호흡기 감염증, 요로감염증으로 진단된 환자들의 가검물로부터 분리된 MRSA 60균주, VRE 43균주, PRSP 25균주를 액체배지 또는 한천배지 희석법을 통하여 linezolid 및 기타 항균제에 대한 최소발육억제농도를 구하였다. 결과 : 실험에 사용한 S. aureus는 모두 MRSA였고 이들은 linezolid에 대해 MIC_(90) 2㎍/㎖(MIC 범위 1-2㎍/㎖), Enterococcus spp는 모두 VRE로 linezolid의 MIC_(90)은 2㎍/㎖로 MIC 범위는 1-4㎍/㎖였다. 한 개의 균주에서 MIC 4㎍/㎖로 중등도 감수성을 보였으나 MIC breakpoint가 (8㎍/㎖인 내성균주는 없고 모두 감수성을 보였다. S. pneumoniae의 경우 penicillin 내성이었고, linezolid MIC_(90) 1㎍/㎖ (MIC 범위 0.5-1㎍/㎖)로 전부 감수성을 보였다. 결론 : Linezolid는 MRSA를 위시한 VRE, PRSP 등의 다제 내성 그람 양성균에 대하여 우수한 시험관내 항균력을 보임을 알 수 있었다. Background : The emergence of multi-drug resistant Gram-positive cocci, such as MRSA, VRE, and VRSA, necessitated to develop new antibiotics, which could replace the glycopeptide. As a result, a new antibiotics named linezolid was developed. Linezolid is different line of oxazolidinones with a good oral bioavailability, compared to other antibiotics. Since appropriate oral antibiotics are not presently available for MRSA, which is a major cause of nosocomial and community acquired infections, the introduction of linezolid will have favorable effect on treatment of infections such as pneumonia or skin infections. In this study, we investigated the antibiotic effect of linezolid on MRSA and VRE isolated from patients who were treated in Korea University Guro Hospital. Material and Methods : By using broth microdilution and agar dilution method we measured minimum inhibitory concentration (MIC) with sixty S. aureus, forty three Enterococcus spp., and twenty five S. pneumoniae isolates from patients who were diagnosed as skin, soft tissue, respiratory, and urinary infections in Korea University Guro Hospital from January, 1998 to December, 2002. Results : All of S. aureus used in this study were MRSA, and MIG_(90) of linezolid was below 2 ㎍/㎖ (MIC ranged between 1-2 ㎍/㎖). All of Enterococcus spp. were VRE, and had MIG_(90) of 2 ㎍/㎖ (MIC ranged between 1 to 4 ㎍/㎖). One of the VRE showed intermediate susceptibility with MIC of 4 ㎍/㎖. However, none was resistant with MIC breakpoint above 8 ㎍/㎖. All of S. pneumoniae were resistant to penicillin, but they were susceptible to linezolid with MICao of 1 ㎍/㎖(MIC range 0.5-1㎍/㎖). Conclusion : In conclusions, linezolid has an excellent in vitro antibiotic effect on multi-drug resistant Gram-positive cocci, such as MRSA, PRSP, and VRE.

Nortriptyline 청소율과 Metoprolol 산화대사능과의 상관관계

정원석,장인진,이경훈,신상구,우종인,박찬웅 大韓臨床藥理學會 1993 臨床藥理學會誌 Vol.1 No.2

경추수술의 골이식 재료로서 장골과 Biocompatible Orthopaedic Polymer(BOP)에 대한 평가

신원한,박진규,김범태,최순관,변박장 대한신경외과학회 1998 Journal of Korean neurosurgical society Vol.27 No.6