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      • 193 nm 용 화학 증폭형 감광제 시뮬레이션을 위한 노광 후 지연 효과에 대한 연구

        이영미,오혜근 한양대학교 이학기술연구소 2001 이학기술연구지 Vol.3 No.-

        The deprotection of 193 run chemically amplified resist is amplified by photo-generated acid during post exposure bake. The acid concentration is changed through reactions such as diffusion, evaporation and acid neutralization with atmospheric base contaminations during post exposure delay. Since the acid concentration greatly affects the final critical dimension, it is very important to control post exposure delay time. In this paper the characteristics of the post exposure delay effect on photoresist profiles was studied. We measured the transmittance and thickness change of the 193 run chemically amplified resist with respect to post exposure delay time. From this result the imaginary refractive index change with post exposure delay time was also obtained. This post exposure delay effect was included in our simulator, LUV (Lithography for Ultra-Violet), and the resulting resist profiles were obtained. 193 nm 용 화학 증폭형 감광제(Chemically Amplified Resist)는 노광(Exposure)을 하면 PAG(Photo Acid Generator)에 의해 산이 생성되고 노광 후 열처리 (Post Exposure Bake) 동안 비보호 (deprotection)반응이 일어나게 된다. 그런데 빛에 의해 만들어진 산은 노광을 하고 노광 후 열처리를 하기까지의 지연 시간 동안 확산, 증발, 그리고 대기중 염기와의 중화반응 등에 의해 농도가 변할 수 있다. 노광과 노광 후 열처리뿐만 아니라 노광 후 지연 (Post Exposure Delay)에 의해 변한 산의 농도가 현상 후 최종 선폭에 막대한 영향을 끼치게 된다. 따라서 본 논문에서는 노광 후 지연 시간에 따른 193 nm 용 양성 화학 증폭형 감광제의 투과율과 두께 변화를 측정하여 노광 후 지연 시간에 따른 하수 굴절률을 얻었고, 그 결과를 노광 후 열처리시 비보호 고분자 영역의 농도와 관련시켜 선폭에 미치는 영향을 연구하였으며 자체 제작한 시뮬레이터 LUV(Lithography for Ultra-Violet)에 적용하였다.

      • 다공성 하천구조물을 이용한 2차 처리수의 수질개선 효과

        이혜미,오종민,최이송 경희대학교 환경연구소 2002 環境硏究 論文集 Vol.11 No.-

        This study was performed to application of porous hydraulic structures(porous weir and porous river bed materials) to water purification in small and middle stream. This study was investigated the ability of water purification according to the variety of environmental conditions, periphytons and material of hydraulic structures. When the ordinary hydraulic structure was used as contact d a , the average removal efficiency of SS, BOD and COD were SS(48.4%), BOD(25.2%), COD(12.0%) respectively. Also when the porous hydraulic structure was used as contact media, the average removal efficiency of SS, BOD, COD and T-P were SS(83.0%), BOD(62.1%), COD(45.9%), T-P(32.3%) respectively. Judging from our results, porous concrete applied to the weir from took a great role of removal efficiencies of BOD, COD(low concentration range of organic materials) and T-P

      • 숙명박물관 브랜드 프로모션을 위한 통합적 브랜드 개발 -2D, 3D, 4D 디자인 프로세스를 중심으로-

        길혜경,김보현,오정은,이서연,이지원,이진민,장미정,이성애 숙명여자대학교 산업디자인연구소 2017 숙명디자인학 연구 Vol.24 No.-

        본 연구는 여성생활사 중심의 유물 박물관인 숙명박물관의 인지도와 브랜딩의 문제를 해결하기 위해 브랜드·스페이스·마케팅을 활용한 통합 브랜드 개발 프로세스를 제안하는데 목적이 있다. 아울러 본 연구는 박물관의 브랜드를 프로모션하고 그래픽, 제품, 공간의 통합 브랜드를 구축하는 일련의 프로세스를 밝히는데 목적이 있다. 이에 본 연구의 시간적 범위는 2017년 3월부터 6월까지 총 15주간 숙명여대 환경디자인학과 <브랜드·스페이스·마케팅>수업에서 진행된 수업의 결과물로서 4개 팀 중, 1개 팀의 작업물로 한다. 본 연구의 대상적 범위는 ‘숙명여자대학교 숙명박물관'의 2D~4D까지의 전반으로 설정한다. 그 결과, 제품부터 공간까지 숙명박물관의 통합된 브랜딩은 일 관성과 객관성, 스토리성을 얻을 수 있었다. ’숙명박물관'은 학교의 박물관이라는 장점을 극대화시켜 가치와 스토리를 부여하고 하나의 브랜드로 리뉴얼했다는 점에서 의의가 있다. 또한 향후 보편적인 박물관들의 차별화된 브랜드 개발의 참고자료로 활용될 수 있을 것으로 기대하며 브랜드 개발에 있어서 G·I, P·I, S·I의 통합 브랜드 메뉴의 기초 자료로 활용될 것으로 사료된다.

      • Faraday's Law에 의한 전기응집공정의 분석

        김혜숙,윤영임,조은정,최윤희,오미영,김영관 江原大學校 産業技術硏究所 2001 産業技術硏究 Vol.21 No.A

        This research was carried out to find out the possibility of using Faraday's law in analyzing the electrocoagulation system. Bench-scale reactor equipped with aluminum electrode plates was operated using synthetic wastewater which received sodium chloride for conductivity adjustment. Phosphate was added to the wastewater to induce the precipitation with Al. The amount of aluminum dissolved from the electrodes could be predicted by Faraday's law with a difference less than 5%. This difference was greater at a higher electric current, probably due to the increased solution temperature. However, effect of pH on the dissolution of the aluminum was negligible. The result of this study suggested that the operating condition of electrocoagulation system could be developed using the Faraday's law when the pollutant concentration is given.

      • 간호사의 이미지에 따른 간호전공만족도

        가미정,김수미,김영경,남수진,오루미,육지수,이혜인,최미나,최혜민,허다은 이화여자대학교 간호과학대학 2010 이화간호학회지 Vol.- No.44

        Purpose: The purpose of this descriptive study is to examine the correlation between nursing students’ perception of nurses and the level of their satisfaction with the major. Method: The survey was done with the total number of 192 nursing students from 10 different universities in S city selected by a convenience samplingmethod. In order to measure the perception of nurses, the measurement which was invented by Lee(1992) and revised by Jang(1998) was used. Also, the measurement designed by Shim, and modified by Kim(2007) was used for measuring of the students’ satisfaction in their major. The collected data was analyzed by SPSS 17.0. Results: 1.The most decisive factor of the conceptualization of the image of nurses for the nursing college students is their experience of meeting nurses as a patient. 2. Students reconsider the role of nurses by experiencing immediate relationships with nurses in field training. 3. Other factors of the survey such as the students’academic year, religion, the field training situation (individual experience, type of the hospital where they experienced the training, and a relationship with the nurse in charge of the training) or the existence of nurses among their family members do not affect the students’ satisfaction. 4. There is a positive correlation between the image of nurses of nursing college students and their satisfaction with the major(0.66). Conclusion: The positive image of nurses is directly related to the students’ satisfaction in the nursing major, which hugely affects on their academic achievements and decisions of career path. Therefore, there should be more efforts to increase the positive perception of nurses among nursing students.

      • 193 nm 용 화학 증폭형 감광제의 노광 후 열처리 과정 중 두께변화에 관한 연구

        이은미,오혜근 한양대학교 이학기술연구소 2001 이학기술연구지 Vol.3 No.-

        화학 증폭형 감광제의 중요한 특징 중 하나는 노광 후 열처리 과정에서 열처리 동안 화학적 반응이 증가하므로 열처리 조건에 따라 노광 된 영역의 감광제의 두께가 변한다는 사실이다. 그러나 지금까지는 이러한 사실을 무시한 채 시뮬레이션이 행해졌었다. 시뮬레이션에 있어서 좀더 정확한 결과를 얻기 위해서는 이러한 두께 감소 효과를 잘 표현해 줄 수 있는 더 나은 시뮬레이터가 필요하다. 본 논문에서는 노광 후 열처리 전후의 193 nm 용 화학 증폭형 감광제의 두께 변화를 측정하였으며 deprotected site의 농도 (Cas)와 두께 변화 사이의 관계를 추출해 내었다. 그리고 이를 자체 개발 시뮬레이터에 적용시켰으며 이것으로 더욱 실제와 가까운 감광제 프로파일을 얻을 수 있었다. 이 시뮬레이션은 탑 라운딩, 측면각, 초점 여유도, 노광량 감소 면에서 향상된 결과를 보여주었다. The chemical reaction is increased during post exposure bake and consequently the thickness of resist in the exposed area is physically reduced in most deep UV and 193 nm chemically amplified resists. However, the current simulator can only depict qualitative result without showing the desired quantitative result, so the demand for the simulator that can correctly mimic the real lithography process has been increased in recent years. In this study the thickness change of a 193 nm chemically amplified resist before and after post exposure bake was measured and the relationship JJetween the concentration of the deprotected sites and the thickness reduction was extracted. This resist thickness reduction effect was included in our modified simulator and more realistic resist profiles could be obtained. The simulation results showed enhancements in top rounding, sidewall angle, focus latitude and dose reduction.

      • 소하천의 수질개선을 위한 자연정화공정 개발에 관한 연구

        이혜미,오종민 경희대학교 환경연구소 2001 環境硏究 論文集 Vol.10 No.-

        This study was performed to application of Porous concrete blocks and aquatic plants to water purification in small urban stream. This study was investigated the ability of water purification according to the variety of environment, epiphytic algae and aquatic plants. When the Porous concrete was used as contact media, the average removal efficiency of SS, BOD and COD were SS(85-95%), COD(50-60%), BOD(65-75%) respectively. Also when the Porous concrete and aquatic plants was used the average removal efficiency of SS and BOD were SS(90-95%), BOD(70-80%) respectively. In result, average removal efficiency of total nitrogen(T-N) with the Porous concrete and aquatic plants was about 40-50%. Average removal efficiency of total phosphorus(T-P) with the Porous concrete and aquatic plants was about 60-70%.

      • 해남화원 관광단지 기본계획 변경(안)

        김농오,김미혜 木浦大學校 工業技術硏究所 2000 工業技術硏究誌 Vol.10 No.-

        The purpose of this thesis is to propose more practical master plan of WHAWON Tourism complex. It is nesessary far us that we should arrange and compose the Land, Plants, Structures and Waterforms for human use and enjoyment. Especially tourist' needs is used to changing as social development. And more ecological design approach is necessay for us to satisfy the tourists and inhabitants also. Therefore, more various facilities, for example, amusement facilities, commodities and eco-tourism facilities should be well allocated to the natural sites. Such a needs and spaces should be adapted to WHAWON Tourism complex. First, Casino facilities were 질located for the new chinese international tourists. It is possible that the casino together with golf course could be developed as Tourism Special complex. Second, camping sites were changed for the walkers and campers together with sportsmen approach more easily. Finally, we designed grand play ground for the family tourists distinguished from the other tourism complexes in Korea.

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