http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Characterization of a Ru-based Ternary-oxide Thin Film for a Diffusion Barrier
홍태은,양호순,김수현 한국물리학회 2012 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.61 No.6
Ruthenium-based ternary-oxide thin films were grown by using thermal atomic layer deposition. The films were grown by repeating super-cycles consisting of Ru and Al<SUB>2</SUB>O<SUB>3</SUB> sub-cycles. X-ray diffraction showed that the structure of Ru ternary oxide thin film formed nano crystalline structure. The chemical state in oxide thin film was clearly investigated by X-ray photoelectron spectroscopy. The composition of Ru based ternary oxide film was characterized by secondary ion mass spectrometry. Quantitative analysis of thin oxide film using SIMS was calibrated by Rutherford backscattering spectrometry. Based on the results, effects on the Aluminum and oxygen incorporation into Ru were discussed.
이차이온질량분석기의 깊이 분포도를 이용한 동선의 열적 확산에 대한 연구
박종진,홍태은,조영진,서영일,문병선,박종찬,박혁규,이정식 한국화재소방학회 2008 한국화재소방학회논문지 Vol.22 No.5
최근에 이차이온질량분석기(Secondary Ion Mass Spectrometry)를 이용한 1·2차 용융흔 구별에 관한 연구가 많은 관심을 끌고 있다. 동선의 깊이 분포에 따른 12C-, 63Cu-, 18O-, 35Cl- 이차 이온을 검출하기 위해 Cs+ 일차 이온빔을 사용하였고, 본 논문에서는 과전류에 의한 동선의 열적 확산에 대해 분석하 였다. 분석결과 PVC 절연피복이 덮인 동선이 보다 더 깊이 탄소와 염소가 확산함을 보였으나, 산소는 절연피복이 덮이지 않은 동선이 더 깊이 확산된 것을 보였다. Recently SIMS has attracted interest as new technique to distinguish the primary and the secondary arc beads. A Cs+ primary ion beam was used to detect the 12C-, 63Cu-, 18O-, 35Cl- secondary ions which are formed during depth profiles in the copper wires. In this work, we studied thermal diffusion in the copper wire which are occurred with supplying over-current. The results demonstrated that Carbon and Chloride are diffused in PVC-coated copper wire deeper than none PVC-coated. However Oxygen showed the reverse diffusion property.