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나노급 인듐 주석 산화물 입자의 물성에 미치는 열처리의 영향
홍성제,한정인,정상권 한국전기전자재료학회 2004 전기전자재료학회논문지 Vol.17 No.7
In this paper, nanocrystalline indium tin oxide (ITO) particles were fabricated by using synthesis without harmful elements. The synthetic method is to eliminate the chloridic and nitridic elements which are included in the current wet type synthetic method. Therefore, it is possible to lower synthetic temperature below 600 $^{\circ}C$ to eliminate the harmful elements. Accordingly, fine particle can be achieved by applying the process. Particle size, surface area, crystal structure, and composition ratio of the synthesized nanocrystalline ITO particle by using the method were analyzed with high resolution transmission electron microscopy (HRTEM), BET surface area analyzer, X-ray diffraction (XRD), and energy dispersion spectroscopy (EDS). As a result, its particle size is less than 10 nm, and the surface area exceeds 100 m$^2$/g. The XRD analysis indicates that the cystal structure of the powder is cubic one with orientation of <222>, <400>, <440>. Also, the analysis of the composition demonstrates that the around 8 wt% tin is uniformly included in In$_2$O$_3$ lattice of the nanoparticle.
홍성제,차승재,이재용,김용성 대한금속·재료학회 2017 ELECTRONIC MATERIALS LETTERS Vol.13 No.1
In this study, particles size of indium tin oxide nanoparticles (ITO-NPs)was improved by in-situ dispersion method. Polyvinylpyrrolidone(PVP) was used as dispersing agent, and reduced precipitates heattreatedat 400 °C. Brunauer, Emmett & Teller (BET) specific surfacearea (SSA) analysis and X-ray diffractometer (XRD) observationsfound that their particle size was improved by using the in-situdispersion. In addition, we found that the particle size of thecrystalline ITO-NPs was changed with the concentration of the PVPas well as the heat-treatment temperature. When 2 wt% PVP wasapplied, the highest BET SSA of the ITO-NPs, 114.7 m2/g, wasobtained after heat-treatment at 400 °C. In fact, the lowest sized, lessthan 7 nm, ITO-NPs was observed with high resolution transmissionelectron microscope (HRTEM). The ITO-NPs were well dispersed inthe solvent to formulate a 20 wt% ITO-NPs solution. ITO-NPscoated layer on 3 × 3 cm2 quartz substrate showed sheet resistance of319 Ω/□ and optical transmittance of 89.5% after heat-treatment at900 °C. Heat was well generated at the ITO-NPs coated layer withsupplied voltage. Also, temperature of above 150 °C was obtainedfrom the transparent heater, and 89 °C was obtained with low power,0.21 W/cm2, that is superior to commercial heaters.