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III-V 화합물 반도체 단결정 성장을 위한 수직형 LPE 장치의 제작
오종환(Jong Hwan Oh),조호성(Ho Sung Cho),홍창희(Tchang Hee Hong) 한국해양대학교 해사산업연구소 1991 海事産業硏究所論文集 Vol.1 No.-
본 연구에서는 수직형 LPE 장치를 손수 설계ㆍ제작하였다. 제작된 LPE 장치에 온도변화는 ±0.05℃ 이내였고, 최소 냉각속도는 0.15℃/min으로 확인되었으며, 이러한 특성은 LPE 방법으로 III-V족 반도체 화합물의 단결정 성장을 하기에 적합하다는 것을 알 수 있었다. 또한 이 장치로 1.3㎛ GaInAsP/InP의 성장을 행하여 본 결과λL은 1.286㎛였고 격자부정합 정도는 약 0.13%정도로 얻어졌다. In this study, the vertical LPE system has been made by hand. The temperature fluctuation and minimum cooling rate of this LPE system are within ±0.05℃ and 0.15℃/min respectively. It is considered that these properties are enough to grow III-V semiconductor compounds single crystals by liquid phase epitaxy method. Futhermore in this study, l.3㎛ InGaAsP /lnP single crystal growing has been successfully obtained by this system. In has been shown the λPL was 1.286㎛, and that the lattice mismatching was about 0.13%.
오종환 ( Oh Jong Hwan ),김정회 ( Kim Jeong Hoi ),박영식 ( Park Young Shik ) 한국구조물진단유지관리공학회 2018 한국구조물진단유지관리공학회 학술발표대회 논문집 Vol.22 No.1
In this study, we evaluate the structural performance of upper and lower separated non-weld PHC pile connectors to develop more economical and practical upper and lower separated non-weld PHC pile connectors.
가시광 InGaAsP/GaAs 결정성장을 위한 상평형도 해석
홍창희,조호성,오종환,예병덕,황상구,배정철,Hong, Tchang-Hee,Cho, Ho-Sung,Oh, Jong-Hwan,Yea, Beyong-Deok,Hwang, Sang-Ku,Bea, Jung-Chul 한국항해항만학회 1991 한국항해학회지 Vol.15 No.3
In order to grow InGaAsP epitaxial layer on GaAs by LPE, an accurate phase diagram for In-Ga-As-P quarternary compounds is required. But the short wavelength InGaAsP/GaAs phase diagram for full wavelength range was not yet reported. In this study, therefore, a theoretical calculation has been carried out by using thermodynamic's equation for InGaAsP/GaAs in order to get the relation between the mole fraction of the sloute and solid phase compounds. And the calculation being compared with the dta of Kawanishi et. al, the result has been shown that his phase diagram obtained by the calculation can apply to growing InGaAsP/GaAs by LPE.