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FLEXIBLE ORGANIC/INORGANIC MOISTURE BARRIER USING PLASMA-POLYMERIZED LAYER
서승우,정호균,채희엽,서상준,조성민 성균관대학교(자연과학캠퍼스) 성균나노과학기술원 2013 NANO Vol.8 No.4
We report a multilayer moisture barrier structure comprised of alternating inorganic aluminum oxide and plasma-polymerized organic layers. The inorganic and organic layers were grown by atomic layer deposition (ALD) and plasma polymerization in vacuum, respectively. The inclusion of plasma-polymerized layers in the multilayer barrier structure enhanced the moisture barrier performance by around 15% for as-deposited samples. After being subjected to 10 000 bending cycles with a bending radius of 2 cm, however, the moisture barrier performance of the multilayer structure was improved by 50% from that of pure inorganic counterpart.