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고주파 마그네트론 스퍼터 기법으로 제조된 Ce : YIG 박막의 화학 조성, 미세구조 및 자기적 특성
박명범(M.-B. Park),조남희(N.-H. Cho) 한국자기학회 2000 韓國磁氣學會誌 Vol.10 No.3
Cerium substituted YIG thin films were grown by rf magnetron sputter techniques. We investigated the effects of post-deposition heat-treatment as well as various deposition parameters such as substrate materials, substrate temperature, sputter power, and sputter gas types on the crystallinity, chemical composition, microstructure and magnetic characteristics of the films. Post-deposition heat treatment over 750℃ was applied to crystallize as-prepared amorphous films, and a strong tendency of particular crystallographic planes lying parallel to substrate surface was observed for the post-deposition heat-treated films on GGG substrate. The chemical composition of the films exhibited a wide range of chemical stoichiometry depending on the oxygen fraction of sputter gas, and in particular the composition of the film deposited in sputter gas with an oxygen fraction of R=10% was Ce_(0.23)Y_(1.30)Fe_(3.50)O₁₂. With raising the temperature of post-deposition heat-treatment from 900℃ to 1100℃, the surface roughness of the film on GGG substrates increased from about 3 ㎚ to 40 ㎚, but their coercive force and ferromagnetic resonance line width decreased from 0.477 ㎄/m to 0.369 ㎄/m and from 12.5 ㎄/m to 8.36 ㎄/m, respectively.
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