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플라즈마 가스와 RF 파워에 따른 NiO 박막의 우선배향성 및 표면형상 변화
류현욱,최광표,노효섭,박용주,권용,박진성,Ryu Hyun-Wook,Choi Gwang-Ryo,Noh Whyo-Sup,Park Yong-Ju,Kwon Yong,Park Jin-Seong 한국재료학회 2004 한국재료학회지 Vol.14 No.2
Nickel oxide (NiO) thin films were deposited on Si(100) substrates at room temperature by RF magnetron sputtering from a NiO target. The effects of plasma gas and RF power on the crystallographic orientation and surface morphology of the NiO films were investigated. X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and atomic force microscopy (AFM) were employed to characterize the deposited film. It was found that the type of plasma gases affected the crystallographic orientation, deposition rate, surface morphology, and crystallinity of NiO films. Highly crystalline NiO films with (100) orientation were obtained when it was deposited under Ar atmosphere. On the other hand, (l11)-oriented NiO films with poor crystallinity were deposited in $O_2$. Also, the increase in RF power resulted in not only higher deposition rate, larger grain size, and rougher surface but also higher crystallinity of NiO films.
류현욱,김병훈,Ryu, Hyun-Wook,Kim, Byung-Hoon 한국세라믹학회 2002 한국세라믹학회지 Vol.39 No.12
입도가 다른 두 가지 고순도 ${\alpha}-Al_2O_3$ 분말을 이용하여 slip casting법과 담금코팅(dip coating)법으로 다공질 알루미나 지지체와 중간층을 각각 제조하였으며, 그 위에 분리막인 산화티탄($Tio_2$)층을 Ti-naphthenate용액으로 screen printing한 후 열분해시켜 형성시킴으로써, 3층 구조의 비대칭성 세라믹 분리막을 제조하였다. 알루미나 지지체의 곡강도, 기공율 및 평균 기공크기는 각각 231 Kg/$cm^2$, 30.26%, 0.19 ${mu}m$였으며, 중간층은 두께가 약 30 ${mu}m$, 평균 기공크기가 0.063 ${mu}m$였다. 또한 최상층 $Tio_2$ 분리막은 그 두께가 약 0.5 ${mu}m$였으며 평균 약 20 nm 정도의 미세 기공들이 매우 균일하게 형성되어 있었다. The fabrication of a three-layered asymmetric ceramic membrane was performed by slip casting of the porous alumina support and dip coating of the alumina intermediate layer using high purity ${\alpha}-Al_2O_3$ powders that have different particle size, followed by screen printing-pyrolysis of the $Tio_2$ layer as an ultrafilteration membrane using Ti-naphthenate solution. The bending strength, porosity and mean pore size of the alumina support were 231 kg/$cm^2$s, 30.26% and 0.19 ${mu}m$, respectively. The thickness of the intermediate layer was 30 ${mu}m$ and the mean pore size of that was 0.063 ${mu}m$. Also, the top layer was 0.5 ${mu}m$ thick and micropores with about 20 nm size were formed uniformly.
Sol-Precipitation법으로 제조된 WO<sub>3</sub> 나노분말을 이용한 후막 센서의 NO<sub>2</sub> 감지 특성
류현욱,박경희,김인천,홍광준,박진성,Ryu, Hyun-Wook,Park, Kyung-Hee,Kim, In-Chun,Hong, Kwang-Joon,Park, Jin-Seong 한국재료학회 2002 한국재료학회지 Vol.12 No.12
Nanosized $WO_3$ powders were synthesized by the sol-precipitation process using $WCl_{6}$ as the starting material, ethanol as a solvent and $NH_4$OH solution as a precipitant, followed by a washing-drying treatment and calcination. The effects on the powder crystallinity and microstructure of calcination temperature were investigated with XRD and FE-SEM. The $WO_3$ powders calcined at $500^{\circ}C$ and $700^{\circ}C$ showed good crystallinity and their mean particle size was 30nm and 70nm, respectively. These powders were used for the preparation of pastes which were printed as thick films on alumina substrates with comb-type Pt electrodes. The particle size strongly influenced the $NO_2$ gas sensing property of the thick films. A significant reduction in the $NO_2$ sensitivity was observed for the film prepared from larger particle size, having thus a larger grain size. For the film having a smaller grain size, on the other hand, the higher $NO_2$ sensitivity was observed and the sensitivity increased with $NO_2$ concentration.