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권득철,윤남식,정광화,신용현,정형 김 한국물리학회 2005 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.47 No.1
A recent study shows that the dielectric relaxation scheme (DRS) can e±ciently overcome thelimitation on the simulation time step for °uid transport simulations of high density plasma dis-charges. The DRS can be classi¯ed into two methods according to way in which the electric ¯eld iscalculated. In this work, we compare the stability, accuracy, and adoptability of the two methods and ¯nd that both methods yield numerically stable results, except for the current density. In spite of the inaccuracy of the current density pro¯les, the method based on solving Poisson equation is adoptable because other plasma parameters are calculated accurately and because that method covers a biased potential condition.
Numerical Investigation of RF Pulsing Effect on Ion Energy Distributions at RF-biased Electrodes
권득철,송미영,윤정식 한국진공학회 2014 Applied Science and Convergence Technology Vol.23 No.5
The ion energy distributions (IEDs) arriving at a substrate strongly affect the etching rates in plasma etching processes. In order to determine the IEDs accurately, it is important to obtain the characteristics of radio frequency (rf) sheath at pulsed rf substrates. However, very few studies have been conducted to investigate pulsing effect on IEDs at multiple rf driven electrodes. Therefore, in this work, we extended previous one-dimensional dynamics model for pulsed-bias electrodes. We obtained the IEDs using the developed rf sheath model and observed that numerically solved IEDs are in a good agreement with the experimental results.
Adapting Curriculum Models, Leisure, Sports, Education
권득철,윤남식 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.50 No.2
A three-dimensional electron heating model is developed for a microwave plasma source with a stub antenna. Electromagnetic fields are expanded into a Fourier-Bessel series with expansion coefficients. The mode excitation method is utilized for obtaining electromagnetic fields based on a Poynting theorem like relation. Using the obtained analytic electromagnetic fields, we investigate the characteristics of the electron power absorption. Finally, a tractable form of the plasma resistance is obtained as a function of various plasma and geometrical parameters and applied to carrying out a parametric study.
A numerical study of the effect of gas injection position in an inductively coupled plasma discharge
권득철,윤남식,J.H. Han,J.W. Shon 한국물리학회 2009 Current Applied Physics Vol.9 No.3
We numerically study the effect of the gas injection position in an inductively coupled plasma (ICP) discharge. To study the effect, we present an injection model when a nozzle is placed inside of the chamber. The results show that the dependency of the neutral density is sensitive, while the difference of the charged particle density is negligible. The electron temperature difference at the injection positions increases slightly when the pressure decreases.
고밀도 유도결합 플라즈마원 유체 수송 시뮬레이션을 위한 모델 및 수치해석 방법 비교
권득철,윤남식,김정형,신용현 대한전기학회 2004 전기학회논문지C Vol.53 No.8(C)
Various models and various boundary conditions have been suggested for fluid transport simulations of high density plasma discharges such as the inductively coupled plasma discharge. In this work, we compare the various models using one-dimensional simulations based on the FDM(finite difference method), the upwind scheme, the power-law scheme, and the dielectric relaxation scheme[1]. Comparing the exactness, the numerical stability and the efficiency of the various models, the most adoptable model is suggested.
유체 모델을 기반으로 하는 유도 결합 플라즈마 시뮬레이터 개발 현황
권득철,윤남식,Kwon, D.C.,Yoon, N.S. 한국진공학회 2009 Applied Science and Convergence Technology Vol.18 No.3
유체 모델을 기반으로 하는 국내의 유도 결합 플라즈마원의 시뮬레이터 개발 현황을 정리하였다. 전체 시뮬레이터를 구성하는 각 부분으로서, 전자 가열, 하전 입자 및 중성종 수송, sheath를 포함한 표면 반응, 그리고 GUI (Graphic User Interface) 및 전후처리기 등의 순으로 설명되었다. 현재까지 시뮬레이터에 구현된 화학 반응 데이터와 swarm 데이터도 정리하여 보았고, 앞으로의 개발 방향을 전망하여 보았다. The domestic development status of Inductively Coupled Plasma (ICP) simulator which is based on fluid model is explained. As each part which composes the unified simulator, electron heating module, charged and neutral particle transport module, surface reaction module including a sheath model, and GUI (Graphic User Interface) with pre- and post-processors are described in order. Also, we present data base status of chemical reaction and physical collision, which has been applied to the recently developed simulator until now. Lastly, some future plans of development are suggested.