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RISS 인기검색어
- 검색키워드
- 저자 : T. D. Vu(부티엔둥) (검색결과 1 건)
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Aspheric Surface Measurement Using a Radial Shearing Interferometer with Iterative Optimization
Q. H. Vu(부광휘),S. H. Lee(이승후),T. D. Vu(부티엔둥),J. H. Lee(이주형) Korean Society for Precision Engineering 2021 한국정밀공학회 학술발표대회 논문집 Vol.2021 No.11월
An ingenious aspherical design not only can effectively control aberrations, but also can produce high performance and reduce complexity to an optical system. By virtue of randomness and variation of this kind of surface, a high accuracy measurement is always a challenge for any optical engineering. In this study, we present an aspherical surface measurement method using a radial shearing interferometer (RSI) combined with iterative optimization for system calibration. The radial shearing interferometer is a powerful tool for wavefront testing due to its reference-free property; wavefront errors of these two interferent arms, produced by a different magnification, are referenced-self to each other. An interferogram is formed without encountering the Nyquist problem, so the phase-shifting technique can fully be applied to find the wavefront. Modeling these two interferent arms using separate configurations and applying iterative optimization with respect to the actual wavefront and the simulation wavefront to find out an exact optics position is the system calibration process, our aspheric measurement is proven to have a high accuracy of waviness with RMS around 50 nm in a single-shot.
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