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RISS 인기검색어
- 검색키워드
- 저자 : Goeckner, M (검색결과 1 건)
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Transient effects caused by pulsed gas and liquid injections into low pressure plasmas
Ogawa, D,Chung, C W,Goeckner, M,Overzet, L IOP Pub ; American Institute of Physics 2010 PLASMA SOURCES SCIENCE AND TECHNOLOGY Vol.19 No.3
<P>The fast injection of liquid droplets into a glow discharge causes significant time variations in the pressure, the chemical composition of the gas and the phases present (liquid and/or solid along with gas). While the variations can be large and important, very few studies, especially kinetic studies, have been published. In this paper we examine the changes brought about in argon plasma by injecting Ar (gas), N<SUB>2</SUB> (gas) hexane (gas) and hexane (liquid droplets). The changes in the RF capacitively coupled power (forward and reflected), electron and ion density (<I>n</I><SUB>e</SUB>, <I>n</I><SUB>i</SUB>), electron temperature (<I>T</I><SUB>e</SUB>) and optical emissions were monitored during the injections. It was found that the Ar injection (pressure change only) caused expected variations. The electron temperature reduced, the plasma density increased and the optical emission intensity remained nearly constant. The N<SUB>2</SUB> and hexane gas injections (chemical composition and pressure changes) also followed expected trends. The plasma densities increased and electron temperature decreased while the optical emissions changed from argon to the injected gas. These all serve to highlight the fact that the injection of evaporating hexane droplets in the plasma caused very little change. This is because the number of injected droplets is too small to noticeably affect the plasma, even though the shift in the chemical composition of the gas caused by evaporation from those same droplets can be very significant. The net conclusion is that using liquid droplets to inject precursors for low pressure plasmas is both feasible and controllable.</P>
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