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박승인(Park, S.),황준영(Hwang, J.Y.),이상호(Lee, S.),강경태(Kang, K.),강희석(Kang, H.),장재혁(Jang, J.),이홍렬(Lee, H.),강신일(Kang, S.) 한국신재생에너지학회 2006 한국신재생에너지학회 학술대회논문집 Vol.2006 No.11
Recently, Direct Methanol Fuel Cell (DMFC) for portable devices has been received much attention because DMFC has a possibility of higher energy density than electrical batteries and smaller size than other fuel cells. This paper presents the fabrication and test of a thermopneumatic microactuator with a phase change for DMFC. A microactuator consists of an inlet an outlet a chamber, a heater and a sensor of resistance temperature detector(RTD). The micoractuator is fabricated by the spin-coating process, the lithograph process, the deep RIE process and so on. The total size of microactuator is 20{times}20{times}0.53mm³. When the current is applied, the heater heats liquid in chamber. As a result the liquid vaporizes. The response of temperature in the chamber was measured using thermocouple The changed temperature is 3?C for 5 sec at 0.032W.