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Al_2O_3를 첨가한 LaFeO_3 박막의 암모니아 가스감지 특성
이복상,조철형,최부천,박기철,마대영,김정규 경상대학교 생산기술연구소 2002 工學硏究院論文集 Vol.2 No.-
LaFeO_3 thin films with 2%, 5% and 10% A1_2O_3 additives were fabricated by r.f. magnetron sputtering method on Al_2O_3 substrates. Structural, electrical and ammonia gas sensing characteristics of the thin films with different heat treatments were examined. From the XRD results, the compound of LaFeO_3 and Al_2O_3 was not found. Thin film with 5% Al_2O_3 additives, heat-treated at 800℃, showed the sensitivities of about 85% for 100ppm ammonia gas at the working temperature of 300℃. The response time to the ammonia gas was several seconds and the thin film showed good selectivity to NH_3 gas.