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SnO<sub>2</sub> 나노와이어를 이용한 저온동작 고감도 고선택성 NO<sub>2</sub> 가스센서
김유종 ( Yoojong Kim ),박소영 ( So-young Bak ),이정석 ( Jeongseok Lee ),이세형 ( Se-hyeong Lee ),우경완 ( Kyoungwan Woo ),이상현 ( Sanghyun Lee ),이문석 ( Moonsuk Yi ) 한국센서학회 2021 센서학회지 Vol.30 No.3
In this paper, methods for improving the sensitivity of gas sensors to NO<sub>2</sub> gas are presented. A gas sensor was fabricated based on an SnO<sub>2</sub> nanowire network using the vapor-phase-growth method. In the gas sensor, the Au electrode was replaced with a fluorinedoped tin oxide (FTO) electrode, to achieve high sensitivity at low temperatures and concentrations. The gas sensor with the FTO electrode was more sensitive to NO<sub>2</sub> gas than the sensor with the Au electrode: notably, both sensors were based on typical SnO<sub>2</sub> nanowire network. When the Au electrode was replaced by the FTO electrode, the sensitivity improved, as the contact resistance decreased and the surface-to-volume ratio increased. The morphological features of the fabricated gas sensor were characterized in detail via field-emission scanning electron microscopy and X-ray diffraction analysis.