우수한 대전방지 및 기계적 성질을 가지는 다공성 산화티탄-산화망간 세라믹스 제조 = Fabrication of porous titanium oxide-manganese oxide ceramics with enhanced anti-static and mechanical properties

다국어 초록 (Multilingual Abstract)

Recently, porous ceramic materials with anti-static performance are urgently needed for semiconductor and OLED/LCD display manufacturing industry. In this work, we fabricated porous titanium manganese oxide ceramics having the surface resistivity of 10 8 -10 10 ohm and enhanced mechanical strength by partial sintering method using nanosized titanium oxide. By addition of nano-sized titanium oxide in the matrix, neck formation between grains was strengthened, which remarkably increased flexural strength up to 170 MPa (@porosity: 15 %), 110 MPa (@porosity: 31 %), compared to 80 MPa (@porosity: 26 %) for pristine titanium manganese oxide ceramics. We evaluated the performances of our ceramics as air-floating module for OLED flexible display manufacturing devices.

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